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Thin Solid Films

Volumn 520, Issue 21, 2012, Pages 6631-6635

Electrical and optical properties of nanocrystalline yttrium-doped hafnium oxide thin films

(3) Noor A Alam, M a Abhilash, K a Ramana, C V a

a University of Texas at El Paso (United States)

Author keywords

Band gap; Electrical conductivity; Structure; Thin films; Y doped hafnia

Indexed keywords

ELECTRICAL AND OPTICAL PROPERTIES; ELECTRICAL CONDUCTIVITY; ELECTRICAL RESISTIVITY; FREQUENCY DEPENDENT; FREQUENCY VARIATION; HAFNIUM OXIDE THIN FILMS; HIGH-TEMPERATURE CUBIC PHASE; HIGHER FREQUENCIES; HOPPING CONDUCTION; LOW FREQUENCY; NANOCRYSTALLINES; ROOM TEMPERATURE; STRUCTURAL STUDIES; Y-DOPED;

AMORPHOUS FILMS; ELECTRIC CONDUCTIVITY; ENERGY GAP; OPTICAL PROPERTIES; OXIDES; STRUCTURE (COMPOSITION); THIN FILMS; VAPOR DEPOSITION; YTTRIUM; YTTRIUM ALLOYS;

HAFNIUM OXIDES;

EID: 84864774932 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.06.080 Document Type: Article

Times cited : (19)

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