Optical and mechanical properties of amorphous and crystalline yttria-stabilized zirconia thin films prepared by pulsed laser deposition

Acta Materialia

Volumn 59, Issue 6, 2011, Pages 2330-2340

  Heiroth, S ^a   Ghisleni, R ^b   Lippert, T ^a   Michler, J ^b   Wokaun, A ^a  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b SWISS FEDERAL LABORATORIES FOR MATERIALS SCIENCE AND TECHNOLOGY   (Switzerland)

Author keywords

Microstructures; Nanoindentation; Optical transmission; Thin films; Yttria stabilized zirconia

Indexed keywords

AMORPHOUS COATING; AMORPHOUS LAYER; ATOMIC PACKING DENSITY; BACKGROUND PRESSURE; BAND GAP ENERGY; CHEMICAL COMPOSITIONS; CRYSTALLINE FILMS; CRYSTALLINE LAYERS; DOPANT LEVELS; FILM MICROSTRUCTURES; FILM POROSITY; FRACTURE BEHAVIOUR; HIGH REFRACTIVE INDEX; LATTICE ORDERS; LOW PRESSURES; LOWER HARDNESS; MONOCLINIC PHASE; NANOINDENTATION EXPERIMENTS; OPTICAL TRANSMISSION; OPTICAL TRANSMISSIVITY; PARTIALLY STABILIZED ZIRCONIA; POLYCRYSTALLINE; REDUCED ELASTIC MODULUS; REFERENCE DATA; STABILIZED ZIRCONIA; STRESS-INDUCED TRANSFORMATION; SUBMICRON; SUBSTRATE TEMPERATURE; SURFACE CRACKS; TRANSMISSION SPECTROPHOTOMETRY; VARIABLE POROSITY; YSZ FILMS; YTTRIA-STABILIZED ZIRCONIA THIN FILMS;

AMORPHOUS FILMS; CRYSTALLINE MATERIALS; DEPOSITION; ELASTIC MODULI; FRACTURE; FRACTURE TOUGHNESS; LIGHT REFRACTION; LIGHT TRANSMISSION; MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOINDENTATION; ORGANIC POLYMERS; OXYGEN; PLASTIC COATINGS; PULSED LASER DEPOSITION; PULSED LASERS; REFRACTIVE INDEX; REFRACTOMETERS; SINGLE CRYSTALS; SURFACE DEFECTS; THIN FILMS; VAPOR DEPOSITION; YTTRIA STABILIZED ZIRCONIA; YTTRIUM ALLOYS; ZIRCONIA;

OPTICAL FILMS;

EID: 79951672727     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2010.12.029     Document Type: Article

References (62)

1. N.Q. Minh J Am Ceram Soc 76 1993 563
2. R. Stevens Zirconia and zirconia ceramics 1986 Magnesium Elektron Ltd. Leeds (UK)
3. E. van Setten, T.M. Gur, D.H.A. Blank, J.C. Bravman, and M.R. Beasley Rev Sci Instrum 73 2002 156
4. R.H.J. Hannink, P.M. Kelly, and B.C. Muddle J Am Ceram Soc 83 2000 461
5. P. Amezaga-Madrid, W. Antunez-Flores, I. Monarrez-Garcia, J. Gonzalez-Hernandez, R. Martinez-Sanchez, and M. Miki-Yoshida Thin Solid Films 516 2008 8282
6. K. Apparao, N.K. Sahoo, and T.C. Bagchi Thin Solid Films 129 1985 L71
7. N. Bazin, J.E. Andrew, and H.A. McInnes J Sol-Gel Sci Technol 13 1998 757
8. S.G. Wu, H.Y. Zhang, G.L. Tian, Z.L. Xia, H.D. Shao, and Z.X. Fan Appl Surf Sci 253 2006 1561
9. Q.Y. Zhang, X.L. Li, J. Shen, G.M. Wu, J. Wang, and L.Y. Chen Mater Lett 45 2000 311
10. L.M. Tong J Cryst Growth 217 2000 281
11. L.M. Tong, Y.H. Shen, L.H. Ye, and Z.C. Ding Meas Sci Technol 10 1999 607
12. P.H. Rogers, G. Sirinakis, and M.A. Carpenter J Phys Chem C 112 2008 6749
13. G. Sirinakis, R. Siddique, I. Manning, P.H. Rogers, and M.A. Carpenter J Phys Chem B 110 2006 13508
14. J.P. Feist, A.L. Heyes, and J.R. Nicholls Proc Inst Mech Eng Part G 215 2001 333
15. A.L. Heyes, S. Seefeldt, and J.P. Feist Two-colour phosphor thermometry for surface temperature measurement Color and design conference vol. 38 2003 Elsevier Science London 257
16. C. Muratore, D.R. Clarke, J.G. Jones, and A.A. Voevodin Wear 265 2008 913
17. I. Kosacki, V. Petrovsky, and H.U. Anderson Appl Phys Lett 74 1999 341
18. C.V. Ramana, R.S. Vemuri, I. Fernandez, and A.L. Campbell Appl Phys Lett 95 2009 2319051
19. G. Garcia, A. Figueras, R.I. Merino, V.M. Orera, and J. Llibre Thin Solid Films 370 2000 173
20. N. Nicoloso, A. Lobert, and B. Leibold Optical absorption studies of tetragonal and cubic thin film yttria-stabilized zirconia E-MRS spring meeting, Strasbourg, France 1991 Elsevier Science Lausanne (Switzerland) 253
21. J. Sanchez-Gonzalez, A. Diaz-Parralejo, A.L. Ortiz, and F. Guiberteau Appl Surf Sci 252 2006 6013
22. Q.L. Xiao, C. Xu, S.Y. Shao, J.D. Shao, and Z.X. Fan Vacuum 83 2008 366
23. B.K. Jang, and H. Matsubara Mater Lett 59 2005 3462
24. D.W. Stollberg, J.M. Hampikian, L. Riester, and W.B. Carter Mater Sci Eng A 359 2003 112
25. S. Heiroth, T. Lippert, A. Wokaun, and M. Döbeli Appl Phys A 93 2008 639
26. S. Heiroth, T. Lippert, A. Wokaun, M. Döbeli, J.L.M. Rupp, and B. Scherrer J Eur Ceram Soc 30 2010 489
27. M. Yoshimoto, T. Maeda, T. Ohnishi, H. Koinuma, O. Ishiyama, and M. Shinohara Appl Phys Lett 67 1995 2615
28. W.C. Oliver, and G.M. Pharr J Mater Res 7 1992 1564
29. R. Ghisleni, K. Rzepiejewska-Malyska, L. Philippe, P. Schwaller, and J. Michler Microsc Res Tech 72 2009 242
30. R. Swanepoel J Phys E 16 1983 1214
31. J.B. Ramirez-Malo, E. Marquez, P. Villares, and R. Jimenez-Garay Phys Status Solidi A 133 1992 499
32. I.H. Malitson J Opt Soc Am 52 1962 1377
33. V. Petrovsky, B.P. Gorman, H.U. Anderson, and T. Petrovsky J Appl Phys 90 2001 2517
34. D.L. Wood, K. Nassau, and T.Y. Kometani Appl Optics 29 1990 2485
35. X.G. Tang, H.R. Zeng, A.L. Ding, P.S. Qiu, W.G. Luo, and H.Q. Li Solid State Commun 116 2000 507
36. R. Thomas, and D.C. Dube Jpn J Appl Phys Part 1 39 2000 1771
37. J. Wang, Y.-H. Yu, S.C. Lee, and Y.-W. Chung Surf Coat Technol 146-147 2001 189
38. S. Zhao, F. Ma, K.W. Xu, and H.F. Liang J Alloys Compd 453 2008 453
39. A. Diaz-Parralejo, R. Caruso, A.L. Ortiz, and F. Guiberteau Thin Solid Films 458 2004 92
40. B.E. Yoldas Appl Optics 19 1980 1425
41. M. Boulouz, A. Boulouz, A. Giani, and A. Boyer Thin Solid Films 323 1998 85
42. 2 thin films E-MRS spring meeting, Strasbourg, France 2005 Elsevier Science Lausanne (Switzerland) 328
43. V.R. Paiverneker, A.N. Petelin, F.J. Crowne, and D.C. Nagle Phys Rev B 40 1989 8555
44. G.S. Pang, S.G. Chen, Y.C. Zhu, O. Palchik, Y. Koltypin, and A. Zaban J Phys Chem B 105 2001 4647
45. 2 thin films (from nm to mm thickness) 44th Meeting of the International Society of Electrochemistry 1994 Pergamon-Elsevier Science Berlin 1273
46. P. Camagni, P. Galinetto, G. Samoggia, and N. Zema Solid State Commun 83 1992 943
47. R.H. French, S.J. Glass, F.S. Ohuchi, Y.N. Xu, and W.Y. Ching Phys Rev B 49 1994 5133
48. J.M. Costantini, F. Beuneu, D. Gourier, C. Trautmann, G. Calas, and M. Toulemonde J Phys: Condens Matter 16 2004 3957
49. J. Kondoh, H. Shiota, K. Kawachi, and T. Nakatani J Alloys Compd 365 2004 253
50. T. Sakuma, and Y.I. Yoshizawa J Mater Sci 20 1985 2399
51. M. Fujikane, D. Setoyama, S. Nagao, R. Nowak, and S. Yamanaka J Alloys Compd 431 2007 250
52. K. Kurosaki, D. Setoyama, J.J. Matsunaga, and S. Yamanaka J Alloys Compd 386 2005 261
53. A. Selcuk, and A. Atkinson J Am Ceram Soc 83 2000 2029
54. G. Alcala, P. Skeldon, G.E. Thompson, A.B. Mann, H. Habazaki, and K. Shimizu Nanotechnology 13 2002 451
55. J. Lian, J.E. Garay, and J.L. Wang Scr Mater 56 2007 1095
56. J.J. Kim, Y. Choi, S. Suresh, and A.S. Argon Science 295 2002 654
57. B. Moser, J.F. Loffler, and J. Michler Discrete deformation in amorphous metals: an in situ SEM indentation study Conference on instrumented indentation testing in materials research and development, Iraklion, Greece 2005 Taylor & Francis London 5715
58. K. Niihara, R. Morena, and D.P.H. Hasselman J Mater Sci Lett 1 1982 13
59. S.L. Jones, C.J. Norman, and R. Shahani J Mater Sci Lett 6 1987 721
60. A.A. Volinsky, J.B. Vella, and W.W. Gerberich Thin Solid Films 429 2003 201
61. X. Li, D. Diao, and B. Bhushan Acta Mater 45 1997 4453
62. F. Schmid, and D.C. Harris J Am Ceram Soc 81 1998 885