A novel running-in method for improving life-time of bulk-fabricated silicon MEMS devices

Tribology Letters

Volumn 47, Issue 2, 2012, Pages 273-284

  Shen, Sihan ^a   Meng, Yonggang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

MEMS devices; Nanotribology; Running in; Silicon; Vapor phase lubrication

Indexed keywords

BEARING SURFACES; DRY NITROGEN; FRICTION PAIR; HEAVY LOADS; IN-PROCESS; LIFE-TIMES; MACRO SCALE; MEMSDEVICES; MICROFRICTION; NITROGEN ENVIRONMENT; RUBBING SURFACES; RUNNING-IN; SILICON MEMS; SILICON-BASED MICROELECTROMECHANICAL SYSTEMS; TEST CONDITION; TEST ENVIRONMENT; TEST SYSTEMS; VAPOR PHASE; WEAR SCARS;

ELECTROMECHANICAL DEVICES; MEMS; NANOTRIBOLOGY; SILICON;

MACHINERY;

EID: 84864711515     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11249-012-9986-8     Document Type: Article

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