Design of a composite microtribology experiment system for silicon sidewalls

American Society of Mechanical Engineers, Tribology Division, TRIB

Volumn , Issue , 2010, Pages 25-27

  Zhang, Wei ^a   Shen, Sihan ^b   Meng, Yonggang ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACQUISITION SYSTEMS; DATA PROCESSING SYSTEMS; DRIVING SYSTEMS; EXPERIMENT SYSTEM; FRICTION CHARACTERISTICS; FRICTION COEFFICIENTS; FRICTION PAIR; LASER TRIANGULATION; MICROCOMPONENT; MICROTRIBOLOGY; OPTICAL FOCUSING SYSTEMS; POSITION-SENSITIVE DETECTORS; SIDE-WALL FRICTION; STATIC STATE; STICK-SLIP;

DATA HANDLING; EXPERIMENTS; FRICTION; NANOCANTILEVERS; SLIP FORMING;

TRIBOLOGY;

EID: 80054757941     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IJTC2010-41218     Document Type: Conference Paper

References (4)

1. Alsem, D.H., et al., Micron-Scale Friction and Sliding Wear of Polycrystalline Silicon Thin Structural Films in Ambient Air. Journal of microelectromechanical systems, 2008. 17(5): p. 1144-1154.
2. van Spengen, W.M. and J.W.M. Frenken, The leiden MEMS tribometer: Real time dynamic friction loop measurements with an on-chip tribometer. Tribology Letters, 2007. 28(2): p. 149-156. (Pubitemid 47614085)
3. Smallwood, S.A., et al., Performance results of MEMS coated with a conformal DLC Wear, 2005. 200(11-12): p. 1179-1189.
4. Guo, Z., et al., Measurement of static and dynamic friction coefficients of sidewalls of bulk-microfabricated MEMS devices with an on-chip micro-tribotester. Sensors and Actuators A: Physical, 2007. 135(2): p. 863-869. (Pubitemid 46518114)