Cover story: MEMS: An end to fear of contact

Tribology and Lubrication Technology

Volumn 66, Issue 2, 2010, Pages

  Day, Linda ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

AIR FORCE RESEARCH LABORATORY; DIRECT METHOD; ELECTRICAL ENGINEERING AND COMPUTER SCIENCE; ELECTROSTATIC INTERACTIONS; INK-JET PRINTER; MEMSDEVICES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANO SCALE; ROOM TEMPERATURE; SATURATION PRESSURE; SURFACE DIPOLE; UNIVERSITY OF CALIFORNIA-BERKELEY; VAPOR PHASE;

CONSUMER PRODUCTS; ELECTRICAL ENGINEERING; LUBRICANTS; MICROELECTROMECHANICAL DEVICES; PRINTERS (COMPUTER); PRINTING PRESSES; RESEARCH LABORATORIES; VAN DER WAALS FORCES; WATER VAPOR;

MEMS;

EID: 77249136780     PISSN: 1545858X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (10)

1. Kim, S.H. Assay, D.B. and Dugger, M.T., "Nanotribology and MEMS Review," NanoToday, 2 (5), Ocotober 2007.
2. Maboudian, R. and Howe, R.T. (1997), "Critical Review: Adhesion in Surface Micromechanical Structures," Journal of Vacuum Science & Technology B, 15, pp. 1-20.
3. Maboudian, R. and Carraro, C. (2004), "Surface Chemistry and Tribology of MEMS," Annual Review of Physical Chemistry, 55, pp. 35-54.
4. Liu, F., Laboriante, I., Bush, B., Roper, C.R., Carraro, C. and Maboudian, R. (2009), "In-Situ Studies of Interfacial Contact Evolution via a 2-axis Deflecting Cantilever Microinstrument," Applied Physics Letters, 95, 131902.
5. Ashurst, W.R., Wijesundara, M.B.J., Carraro, C. and Maboudian, R. (2004), "Tribological Impact of SiC Encapsulation of Released Polycrystalline Silicon Microstructures," Tribology Letters, 17 (2), pp. 195-198.
6. Assay, D.B., Duggers, M.T. and Kim, S.H. (2008), "In-Situ Vapor-Phase Lubrication of MEMS," Tribology Letters, 29 (1), pp. 67-74.
7. Assay, D.B., Dugger, M.T., Ohlhausen, J.A. and Kim, S.H. (2008), "Macro- to Nanoscale Wear Prevention via Molecular Adsorption," Langmuir, 24, pp. 155-159.
8. Krim, J. and Abdelmaksoud, M. (1998), "Nanotribology of Vapor-Phase Lubricants," in Tribology Issues and Opportunities in MEMS, B. Bhushan, ed. (Kluwer Academic, Dordrecht), pp. 273-284.
9. Abdelmaksoud M., Bender J.W. and Krim J. (2002), "Nanotribology of a Vapor-Phase Lubricant: A Quartz Crystal Microbalance Study of Tricresylphosphate (TCP) Uptake on Iron and Chromium," Tribology Letters, 13 (3), pp. 179-186.
10. Hook, D.A., Timpe, S.J., Duggers, M.T. and Krim, J. (2008), "Tribological Degradation of Fluorocarbon Coated Silicon Microdevice Surfaces in Normal and Sliding contact," Journal of Applied Physics, 104 (3), Article 034303.