Lubrication of MEMS under vacuum

Surface and Coatings Technology

Volumn 201, Issue 6, 2006, Pages 2960-2969

  Eapen, Kalathil C ^a   Smallwood, Steven A ^b   Zabinski, Jeffrey S ^c  

^a UNIVERSITY OF DAYTON RESEARCH INSTITUTE   (United States)

^b UNIVERSAL TECHNOLOGY CORPORATION   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Hydrocarbons; Lubrication in vacuum; MEMS; Replenishment

Indexed keywords

ESTERS; HYDROCARBONS; LUBRICANTS; LUBRICATION;

MOBILE PHASE CHEMICAL FUNCTIONALITY; PENTAERYTHITOL ESTER; REPLENISHMENT;

MICROELECTROMECHANICAL DEVICES;

ESTERS; HYDROCARBONS; LUBRICANTS; LUBRICATION; MICROELECTROMECHANICAL DEVICES;

EID: 33751021367     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.06.011     Document Type: Article

References (27)

1. Tsukruk V.V., Nguyen T., Lemieux M., Hazel J., Weber W.H., Shevchenko V., Klimenko N., and Sheludko E. In: Bhushan B. (Ed). Tribology Issues and Opportunities in MEMS (1998), Kluwer Academic Publishers 607
2. Senft D.C., and Dugger M.T. Proc. SPIE Micromachined Devices and Components III vol. 3224 (1997) 31
3. Maboudian R., and Howe R.T. J. Vac. Sci. Technol., B 15 (1997) 1
4. Patton S.T., Cowan W.D., Eapen K.C., and Zabinski J.S. Tribol. Lett. 9 (2000) 199 (and references cited therein)
5. Ashurst W.R., Yau C., Carraro C., Lee C., Kluth G.J., Howe R.T., and Maboudian R. Sens. Actuators, A, Phys. 91 (2001) 239
6. Sundararajan S., and Bhushan B. J. Vac. Sci. Technol., A 19 (2001) 1777
7. Eapen K.C., Patton S.T., and Zabinski J.S. Tribol. Lett. 12 (2002) 35
8. Eapen K.C., Patton S.T., Smallwood S.A., Nainaparampil J.J., and Zabinski J.S. Surf. Coat. Technol. 197 (2005) 270
9. Eapen K.C., Patton S.T., Smallwood S.A., Phillips B.S., and Zabinski J.S. J. Microelectromech. Syst. 14 (2005) 954
10. Deng K., and Ko W.H. Sens. Actuators, A, Phys. 35 (1992) 45
11. Venkatesan S., and Bhushan B. Wear 171 (1994) 25
12. Gardos N. In: Bhushan B. (Ed). Tribology Issues and Opportunities in MEMS (1998), Kluwer Academic Publishers 341
13. Yoon E.S., Kong H., and Lee K.R. Wear 217 (1998) 262
14. Anderson J., Erck R.A., and Erdemir A. Wear 254 (2003) 1070
15. Patton S.T., and Zabinski J.S. Tribol. Int. 35 (2002) 373
16. Lafontan X., Pressecq F., Beaudoin F., Rigo S., Dardalhon M., Roux J.-L., Schmitt P., Kuchenbecker J., Baradat B., Lellouchi D., Le-Touze C., and Nicot J.-M. Microelectron. Reliab. 43 (2003) 1061
17. Dommann A., Enzler A., and Onda N. Microelectron. Reliab. 43 (2003) 1099
18. McComas D.J., Miller G.P., Mitchell J.N., Pope S.E., and Valek P.W. Rev. Sci. Instrum. 74 (2003) 3874
19. Rühe J., Novotny V., Clarke T., and Street G.B. J. Tribol. 118 (1996) 663
20. Rühe J., Blackman G., Novotny V.J., Clarke T., Street G.B., and Kuan S. J. Appl. Polym. Sci. 53 (1994) 825
21. Kim N.Y., and Laibinis P.E. J. Am. Chem. Soc. 119 (1997) 2297
22. G.J. Chen, C.E. Snyder Jr., K.C. Eapen, U.S. Patent 6,278,011, Aug 21 (2001).
23. Patton S.T., Eapen K.C., and Zabinski J.S. Tribol. Int. 34 (2001) 481
24. Tanner D.M., Walraven J.A., Irwin L.W., Dugger M.T., Smith N.F., Eaton W.P., Miller W.M., and Miller S.L. IEEE 37th Annual International Reliability Physics Symposium, San Diego, CA (1999) 189
25. Zanoria E.S., Danyluk S., and McNallan M.J. Tribol. Trans. 38 (1995) 721
26. Zanoria E., Danyluk S., and McNallan M. Wear 181-183 (1995) 784
27. Zanoria E., and Danyluk S. Wear 162-164 (1993) 332