Progress in integrated gyroscopes

IEEE Aerospace and Electronic Systems Magazine

Volumn 19, Issue 11, 2004, Pages 12-17

  Geen, John A ^a  

^a ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORIOLIS ACCELEROMETERS; INTEGRATED GYROSCOPES; MICROMACHINED GYROS;

ACCELEROMETERS; COSTS; GLOBAL POSITIONING SYSTEM; MICROMACHINING; RESONATORS; SEMICONDUCTOR JUNCTIONS; SIGNAL PROCESSING; THICK FILMS;

GYROSCOPES;

EID: 9744219691     PISSN: 08858985     EISSN: None     Source Type: Journal    
DOI: 10.1109/MAES.2004.1365660     Document Type: Article

References (10)

1. A. Kouropenis et al., Performance of MEMS Inertial Sensors, IEEE PLANS 1998.
2. R. Hulsing, MEMS Inertial Rate and Acceleration Sensor, IEEE PLANS 1998.
3. N. Faulkner et al., Integrated MEMS/GPS Navigation Systems, IEEE PLANS 1998.
4. H. Xie et al., J. MEMS, Vol.11, No.2, 2002, pp. 93-101.
5. G. Yan et.al., Integrated Bulk-Micromachined Gyroscope Using Deep Trench Isolation Technology, Maastricht IEEE MEMS 2004, Technical Digest, pp. 605-608.
6. J. Geen, A Path to Low Cost Gyroscopy, Solid State Sensor and Actuator Workshop, Hilton Head, 1998, Technical Digest, pp. 51-54.
7. J. Geen et al., J. Solid State Circuits, Vol. 37, No. 12, 2002, pp.1860-1866.
8. S. Lewis et al., Integrated Sensor and Electronics Processing for >10̂8 "iMEMS" Inertial Measurement Unit Components, Technical Digest of the International Electron Devices Meeting, 2003, pp. 949-952.
9. J. Geen and D. Carow, US Patent 6,122,961, September 26, 2000.
10. J. Geen, US Patent 5,635,640, June 3, 1997.