Effects of annealing on arrays of Ge nanocolumns formed by glancing angle deposition

Applied Surface Science

Volumn 258, Issue 24, 2012, Pages 9762-9769

  Khare, C ^a,d   Gerlach, J W ^a   Hoche T ^b   Fuhrmann, B ^c   Leipner, H S ^c   Rauschenbach, B ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

^c MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^d RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

Ge nanocolumns; Glancing angle deposition; Re crystallization; Thermal annealing

Indexed keywords

DEPOSITION; GERMANIUM; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MERGING; NANOCRYSTALS; SILICON; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

ANNEALING TREATMENTS; GLANCING ANGLE DEPOSITION; MORPHOLOGICAL ALTERATION; NANO-COLUMNS; PATTERNED SUBSTRATES; RECRYSTALLIZATION PROCESS; THERMAL ANNEALING TREATMENT; THERMAL-ANNEALING;

ANNEALING;

EID: 84864671356     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2012.06.027     Document Type: Article

References (54)

1. J.M. Nieuwenhuizen, and H.B. Haanstra Philips Technical Review 27 3-4 1966 87
2. K. Robbie, M.J. Brett, and A. Lakhtakia Journal of Vacuum Science and Technology A 13 6 1995 2991 2993
3. C. Patzig, B. Rauschenbach, W. Erfurth, and A. Milenin Journal of Vacuum Science and Technology B 25 3 2007 833 838
4. T. Karabacak, J.P. Singh, Y.P. Zhao, G.C. Wang, and T.M. Lu Physical Review B 68 2003 125408
5. C. Buzea, G. Beydaghyan, C. Elliott, and K. Robbie Nanotechnology 16 10 2005 1986 1992
6. A.C. van Popta, M.J. Brett, and J.C. Sit Journal of Applied Physics 98 2005 083517
7. J.Q. Xi, M.F. Schubert, J.K. Kim, E.F. Schubert, M.F. Chen, S.Y. Lin, W. Liu, and J.A. Smart Nature Photonics 1 3 2007 176 179
8. A. Lakhtakia, and R. Messier Sculptured Thin Films - Nanoengineered Morphology and Optics 2005 SPIE Bellingham, WA
9. Y.J. Liu, J.G. Fan, Y.P. Zhao, S. Shanmukh, and R.A. Dluhy Applied Physics Letters 89 17 2006
10. S.V. Kesapragada, P. Victor, O. Nalamasu, and D. Gall Nano Letters 6 4 2006 854 857
11. J.J. Steele, A.C. van Popta, M.M. Hawkeye, J.C. Sit, and M.J. Brett Sensors and Actuators B 120 1 2006 213 219
12. C.M. Zhou, and D. Gall Applied Physics Letters 90 9 2007
13. C. Patzig, B. Fuhrmann, H.S. Leipner, and B. Rauschenbach Journal of Nanoscience and Nanotechnology 9 3 2009 1985 1991
14. C. Patzig, C. Khare, B. Fuhrmann, and B. Rauschenbach Physica Status Solidi 247 6 2010 1322 1334
15. C. Patzig, B. Rauschenbach, B. Fuhrmann, and H.S. Leipner Journal of Applied Physics 103 2008 024313
16. M.S. Gudiksen, L.J. Lauhon, J. Wang, D.C. Smith, and C.M. Lieber Nature 415 6872 2002 617 620
17. Y.Y. Wu, R. Fan, and P.D. Yang Nano Letters 2 2 2002 83 86
18. M.S. Dresselhaus, G. Chen, M.Y. Tang, R.G. Yang, H. Lee, D.Z. Wang, Z.F. Ren, J.P. Fleurial, and P. Gogna Advanced Materials 19 8 2007 1043 1053
19. C. Khare, J.W. Gerlach, M. Weise, J. Bauer, T. Höche, and B. Rauschenbach Physica Status Solidi 208 2011 851 856
20. E. Schubert, J. Fahlteich, B. Rauschenbach, M. Schubert, M. Lorenz, M. Grundmann, and G. Wagner Journal of Applied Physics 100 2006 016107
21. M.J. Colgan, B. Djurfors, D.G. Ivey, and M.J. Brett Thin Solid Films 466 2004 92 96
22. W.K. Choi, L. Li, H.G. Chew, and F. Zheng Nanotechnology 18 2007 385302
23. T. Karabacak, J.S. DeLuca, P.I. Wang, G.A. Ten Eyck, D. Ye, G.C. Wang, and T.M. Lu Journal of Applied Physics 99 2006 064304
24. P.I. Wang, T.C. Parker, T. Karabacak, G.C. Wang, and T.M. Lu Nanotechnology 20 2009 085605
25. Z.L. Wang, J.M. Petroski, T.C. Green, and M.A. El-Sayed Journal of Physical Chemistry B 102 32 1998 6145 6151
26. M. Dippel, A. Maier, V. Gimple, H. Wider, W.E. Evenson, R.L. Rasera, and G. Schatz Physical Review Letters 87 9 2001 095505
27. M. Alcoutlabi, and G.B. McKenna Journal of Physics: Condensed Matter 17 15 2005 R461 R524
28. S. Link, Z.L. Wang, and M.A. El-Sayed Journal of Physical Chemistry B 104 33 2000 7867 7870
29. G.K. Kiema, and M.J. Brett Journal of the Electrochemical Society 150 7 2003 E342 E347
30. K.P. Chik, and P.K. Lim Thin Solid Films 35 1 1976 45 56
31. M. Fujii, S. Hayashi, and K. Yamamoto Japanese Journal of Applied Physics 30 4 1991 687 694
32. T.I. Kamins, G. Medeiros-Ribeiro, D.A.A. Ohlberg, and R.S. Williams Journal of Applied Physics 85 2 1999 1159 1171
33. W.K. Choi, S. Kanakaraju, Z.X. Shen, and W.S. Li Applied Surface Science 144-45 1999 697 701
34. W.K. Choi, V. Ho, V. Ng, Y.W. Ho, S.P. Ng, and W.K. Chim Applied Physics Letters 86 2005 143114
35. C. Khare, B. Fuhrmann, H.S. Leipner, J. Bauer, and B. Rauschenbach Journal of Vacuum Science and Technology A 29 5 2011 051501
36. A. Valsesia, T. Meziani, F. Bretagnol, P. Colpo, G. Ceccone, and F. Rossi Journal of Physics D: Applied Physics 40 8 2007 2341 2347
37. C.L. Cheung, R.J. Nikolic, C.E. Reinhardt, and T.F. Wang Nanotechnology 17 5 2006 1339 1343
38. G.D. Zhang, W.G. Sun, S.L. Xu, H.Y. Zhao, H.Y. Su, and H.Z. Wang Journal of Vacuum Science and Technology A 27 4 2009 681 685
39. C. Khare, C. Patzig, J.W. Gerlach, B. Rauschenbach, and B. Fuhrmann Journal of Vacuum Science and Technology A 28 4 2010 1002 1009
40. C. Khare, R. Fechner, J. Bauer, M. Weise, and B. Rauschenbach Journal of Vacuum Science and Technology A 29 4 2011 041503
41. K. Robbie, M.J. Brett, and A. Lakhtakia Nature 384 1996 616
42. E. Schubert, T. Höche, F. Frost, and B. Rauschenbach Applied Physics A: Materials Science & Processing 81 3 2005 481 486
43. W.W. Mullins Journal of Applied Physics 30 1 1959 77 83
44. M. Pelliccione, T. Karabacak, and T.M. Lu Physical Review Letters 96 2006 146105
45. S. Mukherjee, and D. Gall Applied Physics Letters 95 2009 173106
46. S. Mukherjee, and D. Gall Journal of Applied Physics 107 2010 084301
47. S. Mukherjee, C.M. Zhou, and D. Gall Journal of Applied Physics 105 2009 094318
48. K. Kaminska, A. Amassian, L. Martinu, and K. Robbie Journal of Applied Physics 97 2005 013511
49. L.J. Lewis, P. Jensen, and J.L. Barrat Physical Review B 56 4 1997 2248 2257
50. Y.F. Zhang, Y.H. Tang, N. Wang, C.S. Lee, I. Bello, and S.T. Lee Physical Review B 61 7 2000 4518 4521
51. T. Muller, K.H. Heinig, and B. Schmidt Materials Science and Engineering C - Biomimetic and Supramolecular Systems 19 1-2 2002 209 213
52. J.L. Wang, X.S. Chen, G.H. Wang, B.L. Wang, W. Lu, and J.J. Zhao Physical Review B 66 2002 085408
53. M.E. Turner, T.J. Trentler, and V.L. Colvin Advanced Materials 13 3 2001 180 183
54. A.E. Aliev, A.A. Zakhidov, R.H. Baughman, and E. Yablonvitch International Journal of Nanoscience 5 1 2006 157 172