Fabrication of nanopillars by nanosphere lithography

Nanotechnology

Volumn 17, Issue 5, 2006, Pages 1339-1343

  Cheung, C L ^a   Nikolic R J ^b   Reinhardt, C E ^b   Wang, T F ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; MASKS; NANOSTRUCTURED MATERIALS; REACTIVE ION ETCHING; SEMICONDUCTOR MATERIALS;

BOSCH PROCESS; NANOSPHERE LITHOGRAPHY;

LITHOGRAPHY;

EID: 33144470243     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/17/5/028     Document Type: Article

References (18)

1. Khann K V 2004 Physics of carrier-transport mechanisms and ultra-small scale phenomena for theoretical modelling of nanometer MOS transistors from diffusive to ballistic regimes of operation Phys. Rep. 398 67-131
2. Yakushiji Y, Ernult F, Imanura H, Mitani S, Takanashi K, Takahashi S, Maekawa S and Fujimori H 2004 Enhanced spin accumulation and novel magnetotransport in nanoparticles Nat. Mater. 4 57-61
3. Van Blaaderen A 1998 Materials science-Opals in a new light Science 282 887-8
4. Ormonde A D, Hicks E C, Castillo J and Van Duyne R P 2004 Nanosphere lithography: fabrication of large area Ag nanoparticle arrays by convective self-assembly and their characterization by scanning UV-vis extinction spectroscopy Langmuir 20 6927-31
5. Albrecht M, Hu G, Guhr I L, Ulbrich T C, Boneberg J, Leiderer P and Schatz G 2005 Magnetic multilayers on nanospheres Nat. Mater. 4 203-6
6. Whitney A V, Myers B D and Van Duyne R P 2004 Sub-100 nm triangular nanopores fabricated with the reactive ion etching variant of nanosphere lithography and angle-resolved nanosphere lithography Nano Lett. 4 1507-11
7. Jiang P and McFarland M J 2005 Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals J. Am. Chem. Soc. 127 3710-1
8. Kuo C, Shiu J and Chen P 2003 Sub-10 nm fabrication of large-area periodic nanopillar Mater. Res. Soc. Symp. Proc. EXS-2 M5.11.1-11.13
9. Rose J and Baugh D 2004 Nanorings, nanopillars and nanospikes on Si(111) by modified nanosphere lithography: fabrication and application Mater. Res. Soc. Symp. Proc. 832 F7.14.1-14.11
10. Kuo C-W, Shiu J-Y, Chen P L and Somorjai G A 2003 Fabrication of size-tunable large-area periodic silicon nanopillar arrays with sub-10-nm resolution J. Phys. Chem. B 107 9950-3
11. Kaji N, Tezuka Y, Takamura Y, Ueda M, Nishimoto T, Nakanishi H, Horiike Y and Baba Y 2004 Separation of long DNA molecules by quartz nanopillar chips under a direct current electric field Anal. Chem. 76 15-22
12. Kim P, Kim D H, Kim B, Choi S K, Lee S H, Khademhosseini A, Langer R and Suh K Y 2005 Fabrication of nanostructures of polyethylene glycol for applications to protein adsorption and cell adhesion Nanotechnology 16 2420-6
13. Martines E, Seunarine K, Morgan H, Geadegaard N, Wilkinson C D W and Riehle M O 2005 Superhydrophobicity and superhydrophilicity of regular nanopatterns Nano Lett. 5 2097-103
14. Hulteen C and Van Duyne R P 1995 Nanosphere lithography: a materials general fabrication process for periodic particle array surfaces J. Vac. Sci. Technol. A 13 1553-8
15. Blauw M A, Zijlstra T and van der Drift E 2001 Balancing the etching and passivation in time-multiplexed deep dry etching of silicon J. Vac. Sci. Technol. B 19 2930-4
16. Gottscho R A, Jurgensen C W and Vitkavage D J 1992 Microscopic uniformity in plasma-etching J. Vac. Sci. Technol. B 10 2133-47
17. Ayazi F and Najafi K 2000 High aspect-ratio polysilicon micromachining technology Sensors Actuators 87 46-51
18. Ng H T, Han J, Yamada T, Nguyen P, Chen Y P and Meyyapan M 2004 Single crystal nanowire vertical surround-gate field-effect transistor Nano Lett. 4 1247-52