Periodically arranged Si nanostructures by glancing angle deposition on patterned substrates

Physica Status Solidi (B) Basic Research

Volumn 247, Issue 6, 2010, Pages 1322-1334

  Patzig, Christian ^a   Khare, Chinmay ^a   Fuhrmann, Bodo ^b   Rauschenbach, Bernd ^a,c  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

^c UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77954167702     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.200945526     Document Type: Article

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