Ordered silicon nanostructures by ion beam induced glancing angle deposition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 833-838

  Patzig, Christian ^a   Rauschenbach, Bernd ^a   Erfurth, Wilfried ^b   Milenin, Alexey ^b  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GROWTH (MATERIALS); ION BEAM ASSISTED DEPOSITION; PHOTONIC CRYSTALS; SCANNING ELECTRON MICROSCOPY; SILICON;

GLANCING ANGLES; PERIODICITY; SEEDING SPACE; SQUARE LATTICES;

NANOSTRUCTURES;

EID: 34249865338     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2737436     Document Type: Article

References (14)

1. K. Robbie and M. J. Brett, Nature (London) 384, 616 (1997).
2. O. Toader and S. John, Science 292, 1133 (2001).
3. S. R. Kennedy and M. J. Brett, J. Vac. Sci. Technol. B 22, 1184 (2004).
4. M. M. Hawkeye and M. J. Brett, J. Appl. Phys. 100, 044322 (2006).
5. J. J. Steele, A. C. van Popta, M. M. Hawkeye, J. C. Sit, and M. J. Brett, Sens. Actuators B 120, 213 (2006).
6. B. Dick, M. J. Brett, T. J. Smy, M. R. Freeman, M. Malac, and R. F. Egerton, J. Vac. Sci. Technol. A 18, 1838 (2000).
7. D. X. Ye, T. Karabacak, B. K. Lim, G. C. Wang, and T. M. Lu, Nanotechnology 15, 817 (2004).
8. E. Schubert, T. Höche, F. Frost, and B. Rauschenbach, Appl. Phys. A: Mater. Sci. Process. 81, 481 (2005).
9. E. Schubert, J. Fahlteich, T. Höche, G. Wagner, and B. Rauschenbach, Nucl. Instrum. Methods Phys. Res. B 244, 40 (2006).
10. E. Schubert, J. Fahlteich, B. Rauschenbach, M. Schubert, M. Lorenz, M. Grundmann, and G. Wagner, J. Appl. Phys. 100, 016107 (2006).
11. M. Zeuner, F. Scholze, B. Dathe, and H. Neumann, Surf. Coat. Technol. 142-144, 39 (2001).
12. Sputtering by Particle Bombardement I, Topics in Applied Physics, edited by, R. Behrisch, (Springer, Berlin, 1981), Vol. 47.
13. D. X. Ye, T. Karabacak, R. C. Picu, G. C. Wang, and T. M. Lu, Nanotechnology 16, 1717 (2005).
14. M. O. Jensen and M. J. Brett, Appl. Phys. A: Mater. Sci. Process. 80, 763 (2005).