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Volumn 51, Issue 7 PART 1, 2012, Pages

Hydrogen effects on the properties of silicon/nitrogen-coincorporated diamond-like carbon films prepared by plasma-enhanced chemical vapor deposition

(4) Nakazawa, Hideki a Okuno, Saori a Miura, Soushi a Kamata, Ryosuke a

a HIROSAKI UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON GAS; CHEMICAL BONDINGS; DIAMOND-LIKE CARBON; DILUTION GAS; DLC FILM; FILM SURFACES; FLOW RATIOS; FRICTION COEFFICIENTS; HEXAMETHYLDISILAZANE; HYDROGEN EFFECT; HYDROGEN GAS; MECHANICAL AND TRIBOLOGICAL PROPERTIES; RADIO FREQUENCIES; RECIPROCATING FRICTION; SCRATCH TEST; WEAR RATES;

ADHESION; ARGON; BOND STRENGTH (MATERIALS); CARBON FILMS; CHEMICAL BONDS; FRICTION; HYDROGEN; MECHANICAL PROPERTIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; VAPORS;

DIAMOND LIKE CARBON FILMS;

EID: 84863799709 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.51.075801 Document Type: Article

Times cited : (13)

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