Mechanical and tribological properties of Ar incorporated diamond-like carbon films

Thin Solid Films

Volumn 416, Issue 1-2, 2002, Pages 145-152

  Zhang, Wei ^a   Tanaka, Akihiro ^b   Wazumi, Koichiro ^a   Koga, Yoshinori ^b  

^a JAPAN FINE CERAMICS CENTER   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Ar incorporated diamond like carbon film; Friction; Mechanical property; Wear

Indexed keywords

ARGON; FRICTION; LOADS (FORCES); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; TRIBOLOGY; WEAR OF MATERIALS;

CRITICAL LOADS;

DIAMOND LIKE CARBON FILMS;

EID: 0037009722     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00611-9     Document Type: Article

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