Tribological properties of DLC films with different hydrogen contents in water environment

Diamond and Related Materials

Volumn 13, Issue 11-12, 2004, Pages 2216-2220

  Suzuki, M ^a   Ohana, T ^a   Tanaka, A ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

DLC film; Hydrogen content; Tribology; Water environment

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FRICTION; HARDNESS; HYDROGEN; RAMAN SPECTROSCOPY; SILICON WAFERS; SPUTTER DEPOSITION; TRIBOLOGY;

ATMOSPHERIC ENVIRONMENTS; FRICTION SURFACES; HYDROGEN CONTENT; WATER ENVIRONMENT;

DIAMOND LIKE CARBON FILMS;

EID: 7544239894     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.06.023     Document Type: Conference Paper

References (9)

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