The structure and tribological property of amorphous carbon and carbon nitride films prepared by ECR plasma sputtering method

Diamond and Related Materials

Volumn 10, Issue 3-7, 2001, Pages 1093-1097

  Ohana, T ^a   Goto, A ^a   Yamamoto, K ^a   Nakamura, T ^a   Tanaka, A ^a,b   Osawa, Y ^c   Yoda, H ^c   Sahashi, M ^c   Koga, Y ^a  

^a NATL INST OF MAT AND CHEM RES   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c TOSHIBA CORPORATION   (Japan)

Author keywords

Amorphous carbon; Friction; Nitride; Tribology

Indexed keywords

ARGON; CARBON NITRIDE; RAMAN SCATTERING; SCANNING ELECTRON MICROSCOPY; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

FRICTION COEFFICIENTS;

THIN FILMS;

CARBON; CARBON NITRIDE; INORGANIC COATING; SPUTTERING; TRIBOLOGY;

EID: 0035269265     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00586-0     Document Type: Article

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