Fluorine in Ge: Segregation and EOR-defects stabilization

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 282, Issue , 2012, Pages 21-24

  Boninelli, S ^a   Impellizzeri, G ^a   Priolo, F ^a   Napolitani, E ^b   Spinella, C ^c  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

^c CNR   (Italy)

Author keywords

Defects; Germanium; Impurities; Segregation

Indexed keywords

AMORPHOUS/CRYSTALLINE INTERFACE; ANNEALED SAMPLES; END-OF-RANGE DEFECTS; FLUENCES; RATE RETARDATION; SELF-IMPLANTATION; SOLID PHASE EPITAXY; STRUCTURAL CHARACTERIZATION; THERMAL EVOLUTION;

DEFECTS; GERMANIUM; IMPURITIES; SEGREGATION (METALLOGRAPHY);

FLUORINE;

EID: 84861613450     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2011.08.039     Document Type: Conference Paper

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