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Applied Physics Letters

Volumn 93, Issue 6, 2008, Pages

Formation and evolution of F nanobubbles in amorphous and crystalline Si

(7) Boninelli, S a,e Impellizzeri, G a Mirabella, S a Priolo, F a Napolitani, E b Cherkashin, N c Cristiano, F d

a UNIVERSITY OF CATANIA (Italy)

b UNIVERSITY OF PADOVA (Italy)

c CEMES CNRS (France)

d LAAS CNRS (France)

e ISTITUTO ITALIANO DI TECNOLOGIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH; CRYSTALLINE MATERIALS; DANGLING BONDS; EPITAXIAL GROWTH; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR RADIATION;

AMORPHOUS MATRICES; CRYSTALLINE SI; HIGH-TEMPERATURE ANNEALING; NANOBUBBLES; SOLID-PHASE EPITAXY;

AMORPHOUS SILICON;

EID: 49749147573 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2969055 Document Type: Article

Times cited : (18)

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