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Volumn 95, Issue 10, 2009, Pages

Formation and incorporation of SiF 4 molecules in F-implanted preamorphized Si

(12) De Salvador, D a Bisognin, G a,e Napolitani, E a Mastromatteo, M a Baggio, N a Carnera, A a Boscherini, F b Impellizzeri, G c Mirabella, S c Boninelli, S c Priolo, F c Cristiano, F d

a UNIVERSITY OF PADOVA (Italy)

b UNIVERSITY OF BOLOGNA (Italy)

c UNIVERSITY OF CATANIA (Italy)

d UNIVERSITÉ DE TOULOUSE (France)

e CNISM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COHERENT FRAMEWORKS; CRYSTALLINE MATRICES; CRYSTALLINE SILICONS; KINETIC PATHWAY; LOCAL STRUCTURE; PREAMORPHIZED SI; SOLID PHASE EPITAXIAL REGROWTH;

CRYSTALLINE MATERIALS; FLUORINE; SEMICONDUCTING SILICON COMPOUNDS;

ABSORPTION SPECTROSCOPY;

EID: 70249104200 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3216806 Document Type: Article

Times cited : (12)

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