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Volumn 106, Issue 6, 2009, Pages

Fluorine codoping in germanium to suppress donor diffusion and deactivation

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC TRANSPORT; CO-DOPING; CONCENTRATION OF; DONOR ATOMS; ELECTRONIC DEVICE; ELECTRONIC STRUCTURE CALCULATIONS; MASS ACTION;

EID: 70349647009     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3224900     Document Type: Article
Times cited : (66)

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