High-resolution X-ray diffraction by end of range defects in self-amorphized Ge

Materials Science and Engineering: B

Volumn 154-155, Issue 1-3, 2008, Pages 64-67

  Bisognin, G ^a,b   Vangelista, S ^b   Bruno, E ^a  

^a CNR   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

Defects annealing; End of range defects; Germanium; High resolution X ray diffraction

Indexed keywords

X RAY DIFFRACTION ANALYSIS;

AMORPHOUS LAYER; DEFECT ANNEALING; END-OF-RANGE DEFECTS; EPITAXIAL RECRYSTALLIZATION; GERMANIUMS (GE); HIGH RESOLUTION XRAY DIFFRACTION (XRD); LIQUID NITROGEN TEMPERATURE; SOLID PHASE EPITAXIAL; STRAINED LAYERS;

GERMANIUM;

EID: 56949089181     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.08.002     Document Type: Article

References (23)

1. Chui C.O., Kim H., Chi D., Triplett B.B., McIntyre P.C., and Saraswat K.C. IEDM Tech. Dig. 437 (2002)
2. Olson G.L., and Roth J.A. Mater. Sci. Rep. 3 (1988) 1-78
3. Satta A., Simoen E., Clarysse T., Janssens T., Benedetti A., De Jaeger B., Meuris M., and Vandervorst W. Appl. Phys. Lett. 87 (2005) 172109
4. Claverie A., Colombeau B., Ben Assayag G., Bonafos C., Cristiano F., Omri M., and De Mauduit B. Mater. Sci. Semicond. Process 3 (2000) 269-277
5. Jain S.C., Schoenmaker W., Lindsay R., Stolk P.A., Decoutere S., Willander M., and Maes H.E. J. Appl. Phys. 91 (2002) 8919
6. Nishikawa S., Tanaka A., and Yamaji T. Appl. Phys. Lett. 60 (1992) 2270
7. Napolitani E., Coati A., De Salvador D., Carnera A., Mirabella S., Scalese S., and Priolo F. Appl. Phys. Lett. 79 (2001) 4145
8. Mirabella S., Impellizzeri G., Bruno E., Romano L., Grimaldi M.G., Priolo F., Napolitani E., and Carnera A. Appl. Phys. Lett. 86 (2005) 121905
9. Shao L., Liu J., Chen Q.Y., and Chu W.-K. Mater. Sci. Eng. Res. 42 (2003) 65, and reference therein
10. Chao Y.-L., Prussin S., Woo J.C.S., and Scholz R. Appl. Phys. Lett. 87 (2005) 142102
11. Hickey D.P., Bryan Z.L., Jones K.S., Elliman R.G., and Haller E.E. Appl. Phys. Lett. 90 (2007) 132114
12. Hickey D.P., Bryan Z.L., Jones K.S., Elliman R.G., and Haller E.E. J. Vac. Sci. Technol. B 26 1 (2008) 425-429
13. Bisognin G., De Salvador D., Napolitani E., Berti M., Polimeni A., Capizzi M., Rubini S., Martelli F., and Franciosi A. J. Appl. Crystallogr. 41 (2008) 366-372
14. Bisognin G., De Salvador D., Napolitani E., Carnera A., Bruno E., Mirabella S., Piro A.M., Romano L., and Grimaldi M.G. J. Phys. Condens. Matter 20 (2008) 175215
15. Desnica-Francovic I.D., Dubcek P., Desnica U.V., Bernstorff S., Ridgway M.C., and Glover C.J. Nucl. Instrum. Method B 249 (2006) 114-117
16. Milita S., and Servidori M. J. Appl. Crystallogr. 28 (1995) 666
17. Wormington M., Panaccione C., Matney K.M., and Bowen K. Philos. Trans. Res. Soc. London Ser. A 357 (1999) 2827-2848
18. Opyd W.G., Gibbons J.F., Bravman J.C., and Parker M.A. Appl. Phys. Lett. 49 15 (1986) 974
19. Servidori M., Angelucci R., Cembali F., Negrini P., Solmi S., Zaumseil P., and Winter U. J. Appl. Phys. 61 5 (1987) 1834-1840
20. Zaumseil P., Winter U., Cembali F., Servidori M., and Sourek Z. Phys. Stat. Sol. A 100 (1987) 95
21. Haynes T.E., Antonell M.J., Archie Lee C., and Jones K.S. Phys. Rev. B 51 (1995) 7762
22. Bisognin G., De Salvador D., Napolitani E., Carnera A., Bruno E., Mirabella S., Priolo F., and Mattoni A. Semicond. Sci. Technol. 21 (2006) L41-L44
23. Mazzone A.M. Phys. Stat. Sol. A 95 (1986) 149