Fluorine counter doping effect in B-doped Si

Applied Physics Letters

Volumn 91, Issue 13, 2007, Pages

  Impellizzeri, G ^a   Mirabella, S ^a   Piro, A M ^a   Grimaldi, M G ^a   Priolo, F ^a   Giannazzo, F ^b   Raineri, V ^b   Napolitani, E ^c   Carnera, A ^c  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR IMM   (Italy)

^c UNIVERSITY OF PADOVA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEXATION; DOPING (ADDITIVES); SEMICONDUCTOR JUNCTIONS; SILICON; SUBSTITUTION REACTIONS;

CARRIER DOSE; CHEMICAL INTERACTION; DOPANT COMPENSATION EFFECT;

FLUORINE;

EID: 34848865275     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2790373     Document Type: Article

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