Atomic transport in germanium and the mechanism of arsenic diffusion

Materials Science in Semiconductor Processing

Volumn 9, Issue 4-5 SPEC. ISS., 2006, Pages 471-476

  Bracht, Hartmut ^a   Brotzmann, Sergej ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

Arsenic; Dopant diffusion; Germanium; Self diffusion; Vacancy

Indexed keywords

ACTIVATION ENERGY; ARSENIC; DIFFUSION; ENTHALPY;

ACTIVATION ENTHALPY; DOPANT DIFFUSION; SELF-DIFFUSION;

GERMANIUM;

EID: 33845211230     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2006.08.041     Document Type: Article

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