Thin-film zero-group-velocity Lamb wave resonator

Applied Physics Letters

Volumn 99, Issue 3, 2011, Pages

  Yantchev, Ventsislav ^a   Arapan, Lilia ^a   Katardjiev, Ilia ^a   Plessky, Victor ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b GVR Trade SA   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE RESONATORS; ALUMINUM NITRIDE FILMS; BASIC PRINCIPLES; HIGH FREQUENCY RESONATORS; LAMB WAVE RESONATORS; SMALL FORM FACTORS;

ACOUSTICS; ALUMINUM NITRIDE; APPROXIMATION THEORY; NITRIDES; RESONATORS;

ACOUSTIC RESONATORS;

EID: 79960813443     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3614559     Document Type: Article

References (9)

1. J. Bjurström, I. Katardjiev, and V. Yantchev, Appl. Phys. Lett. 86, 154103 (2005). 10.1063/1.1900312 (Pubitemid 40861473)
2. C.-M. Lin, T.-T. Yen, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, Appl. Phys. Lett. 97, 083501 (2010). 10.1063/1.3481361
3. G. Piazza, P. J. Stephanou, and A. P. Pisano, J. Microelectromech. Syst. 15, 1406 (2006). 10.1109/JMEMS.2006.886012 (Pubitemid 44921759)
4. M. Kadota, T. Ogami, K. Yamamoto, and H. Tochishita, Phys. Status Solidi A 208, 1068 (2011). 10.1002/pssa.201000060
5. I. Koné, F. Domingue, A. Reinhardt, H. Jacquinot, M. Borel, M. Gorisse, G. Parat, F. Casset, D. Pellissier-Tanon, J. F. Carpentier, L. Buchaillot, and B. Dubus, Appl. Phys. Lett. 96, 223504 (2010). 10.1063/1.3440370
6. K. Kokkonen, T. Pensala, J. Meltaus, M. Kaivola, Appl. Phys. Lett. 96, 173502 (2010). 10.1063/1.3299012
7. K. L. Telschow and J. D. Larson III, Proc. Int. IEEE Ultrason. Symp. 1, 280 (2003).
8. E. Adler, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 36, 223 (1989). 10.1109/58.19155
9. M. Benetti, D. Cannatà, F. Di Pietrantonio, V. Foglietti, and E. Verona, Appl. Phys. Lett. 87, 173504 (2005). 10.1063/1.2112187 (Pubitemid 41717018)