Optical and structural performance of the Al(1%wtSi)/Zr reflection multilayers in the 17-19nm region

Optics Express

Volumn 20, Issue 10, 2012, Pages 10692-10700

  Zhong, Qi ^a   Li, Wenbin ^a   Zhang, Zhong ^a   Zhu, Jingtao ^a   Huang, Qiushi ^a   Li, Haochuan ^a   Wang, Zhanshan ^a   Jonnard, Philippe ^b   Le Guen, Karine ^b   André, Jean Michel ^b   Zhou, Hongjun ^c   Huo, Tonglin ^c  

^a TONGJI UNIVERSITY   (China)

^b SORBONNE UNIVERSITÉ   (France)

^c UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; FLUORINE; MULTILAYERS; REFLECTION; TIN; TIN OXIDES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZIRCONIUM;

AFM IMAGE; DIRECT-CURRENT MAGNETRON SPUTTERING; EXTREME ULTRAVIOLETS; FLUORINE DOPED TIN OXIDE; INTERFACIAL ROUGHNESS; REFLECTION MULTILAYERS; ROUGHNESS COMPONENTS; STRUCTURAL PERFORMANCE; TRANSMISSION ELECTRON MICROSCOPE; TWO LAYER MODEL; VARIABLE STRUCTURES;

OPTICAL MULTILAYERS;

ALUMINUM; ZIRCONIUM;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; CRYSTALLIZATION; EQUIPMENT DESIGN; MAGNETISM; MATERIALS TESTING; METHODOLOGY; OPTICS; SURFACE PROPERTY; TRANSMISSION ELECTRON MICROSCOPY; X RAY; X RAY DIFFRACTION;

ALUMINUM; CRYSTALLIZATION; EQUIPMENT DESIGN; MAGNETICS; MATERIALS TESTING; MICROSCOPY, ATOMIC FORCE; MICROSCOPY, ELECTRON, TRANSMISSION; OPTICS AND PHOTONICS; SURFACE PROPERTIES; X-RAY DIFFRACTION; X-RAYS; ZIRCONIUM;

EID: 84861125097     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.20.010692     Document Type: Article

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