Roughening and smoothing behavior of Al/Zr multilayers grown on flat and saw-tooth substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8139, Issue , 2011, Pages

  Voronov, D L ^a   Anderson, E H ^a   Cambie, R ^a   Gullikson, E M ^a   Salmassi, F ^a   Warwick, T ^a   Yashchuk, V V ^a   Padmore, H A ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Diffraction grating; EUV; Multilayer; Power Spectral Density; Relaxation; Roughening; Soft x rays; Surface morphology; Wet anisotropic etch

Indexed keywords

ANISOTROPIC ETCH; EUV; POWER SPECTRAL; RELAXATION; ROUGHENING; SOFT X-RAY;

DIFFRACTION; DIFFRACTION GRATINGS; DIFFUSION IN SOLIDS; EFFICIENCY; GROWTH KINETICS; OPTICS; POWER SPECTRAL DENSITY; SPECTRAL DENSITY; SUBSTRATES; SUN; SURFACE DIFFUSION; SURFACE MORPHOLOGY; X RAY LITHOGRAPHY; X RAY SCATTERING; X RAY SPECTROSCOPY;

MULTILAYERS;

EID: 80054052937     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.893774     Document Type: Conference Paper

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