메뉴 건너뛰기




Volumn 5168, Issue , 2004, Pages 1-11

EUV Multilayers for Solar Physics

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ASTROPHYSICS; BORON COMPOUNDS; COATINGS; MAGNETRON SPUTTERING; MOLYBDENUM; SILICON CARBIDE; SOLAR SYSTEM; SPECTROMETERS; ULTRAVIOLET RADIATION; X RAYS;

EID: 1842639135     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.506175     Document Type: Conference Paper
Times cited : (69)

References (26)
  • 2
    • 0001055146 scopus 로고
    • Growth of molybdenum on silicon: Structure and interface formation
    • J. M. Slaughter, A. Shapiro, P. A. Kearney, and C. M. Falco, 'Growth of molybdenum on silicon: structure and interface formation', Phys. Rev. B, 44, 3854 (1991)
    • (1991) Phys. Rev. B , vol.44 , pp. 3854
    • Slaughter, J.M.1    Shapiro, A.2    Kearney, P.A.3    Falco, C.M.4
  • 3
    • 0000375505 scopus 로고
    • Interface imperfections in metal/Si multilayers
    • D. L. Windt, R. Hull, and W. K. Waskiewicz, 'Interface imperfections in metal/Si multilayers', J. Appl. Phys., 71, 2675-2678 (1992)
    • (1992) J. Appl. Phys. , vol.71 , pp. 2675-2678
    • Windt, D.L.1    Hull, R.2    Waskiewicz, W.K.3
  • 6
    • 0034427440 scopus 로고    scopus 로고
    • Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS)
    • J. Seely, 'Multilayer grating for the Extreme Ultraviolet Spectrometer (EIS)', SPIE, 4138, 174-181 (2002)
    • (2002) SPIE , vol.4138 , pp. 174-181
    • Seely, J.1
  • 7
    • 0001070396 scopus 로고
    • Multilayer facilities required for extreme-ultraviolet lithography
    • D. L. Windt and W. K. Waskiewicz, 'Multilayer facilities required for extreme-ultraviolet lithography', J. Vac. Sci. Technol. B, 12, 3826-3832 (1994)
    • (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 3826-3832
    • Windt, D.L.1    Waskiewicz, W.K.2
  • 8
    • 85043727879 scopus 로고    scopus 로고
    • Experimental comparison of extreme ultraviolet multilayer coatings for solar physics
    • submitted to
    • D. L. Windt, S. Donguy, J. Seely, B. Kjornrattanawanich, 'Experimental comparison of extreme ultraviolet multilayer coatings for solar physics', submitted to App. Opt.
    • App. Opt.
    • Windt, D.L.1    Donguy, S.2    Seely, J.3    Kjornrattanawanich, B.4
  • 9
    • 1842727186 scopus 로고    scopus 로고
    • J. Seely, et al., these proceedings
    • J. Seely, et al., these proceedings.
  • 11
    • 0001081549 scopus 로고    scopus 로고
    • C/Si multilayer mirrors for the 25-30 nm wavelength region
    • M. Grigonis and E. J. Knystautas, 'C/Si multilayer mirrors for the 25-30 nm wavelength region', App. Op. 36, 2839 (1997)
    • (1997) App. Op. , vol.36 , pp. 2839
    • Grigonis, M.1    Knystautas, E.J.2
  • 12
    • 33745285024 scopus 로고
    • Extreme ultraviolet spectrum of a solar active region from SERTS
    • R. J. Thomas and W. M. Neupert, 'Extreme ultraviolet spectrum of a solar active region from SERTS', Ap. J. S., 91, 461-482 (1994)
    • (1994) Ap. J. S. , vol.91 , pp. 461-482
    • Thomas, R.J.1    Neupert, W.M.2
  • 14
    • 0036543155 scopus 로고    scopus 로고
    • Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38 nm wavelength
    • J. F. Seely, Yu. A. Uspenskii, Yu. P. Pershin, V. V. Kondratenko, and A. V. Vinogradov, "Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38 nm wavelength," App. Opt. 41, 1846 (2002).
    • (2002) App. Opt. , vol.41 , pp. 1846
    • Seely, J.F.1    Uspenskii, Yu.A.2    Pershin, Yu.P.3    Kondratenko, V.V.4    Vinogradov, A.V.5
  • 16
    • 0004932883 scopus 로고
    • X-ray interactions: Photabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92
    • B. L. Henke, E. M. Gullikson, and J. C. Davis, 'X-ray interactions: photabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92', At. Data Nuclear Data Tables, 54, 181 (1993)
    • (1993) At. Data Nuclear Data Tables , vol.54 , pp. 181
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 17
    • 0036575170 scopus 로고    scopus 로고
    • Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm
    • B. Sae-Lao, S. Bajt, C. Montcalm, and J. F. Seely, 'Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm', App. Op., 41, 2394-2400 (2002)
    • (2002) App. Op. , vol.41 , pp. 2394-2400
    • Sae-Lao, B.1    Bajt, S.2    Montcalm, C.3    Seely, J.F.4
  • 18
    • 0000047681 scopus 로고    scopus 로고
    • Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region
    • C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pépin, and C. M. Falco, 'Survey of Ti-, B-, and Y-based soft x-ray-extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region', App. Op., 35, 5134-5147 (1996)
    • (1996) App. Op. , vol.35 , pp. 5134-5147
    • Montcalm, C.1    Kearney, P.A.2    Slaughter, J.M.3    Sullivan, B.T.4    Chaker, M.5    Pépin, H.6    Falco, C.M.7
  • 19
    • 84975534742 scopus 로고
    • Normal incidence X-ray mirror for 7 nm
    • D. G. Stearns, R. S. Rosen, and S. P. Vernon, 'Normal incidence X-ray mirror for 7 nm', Opt. Let., 16, 1283-1285 (1991)
    • (1991) Opt. Let. , vol.16 , pp. 1283-1285
    • Stearns, D.G.1    Rosen, R.S.2    Vernon, S.P.3
  • 20
    • 0001726587 scopus 로고    scopus 로고
    • Improved Analyzer Multilayers for Aluminium and Boron Detection with X-Ray Fluorescence
    • P. Ricardo, R. G. Wiesmann, C. Nowak, C. Michaelsen, D. Bormann, 'Improved Analyzer Multilayers for Aluminium and Boron Detection with X-Ray Fluorescence', App. Op., 40, 2747-2754 (2001)
    • (2001) App. Op. , vol.40 , pp. 2747-2754
    • Ricardo, P.1    Wiesmann, R.G.2    Nowak, C.3    Michaelsen, C.4    Bormann, D.5
  • 24
    • 0035764905 scopus 로고    scopus 로고
    • Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition
    • F. Eriksson, G. A. Johansson, H. M. Hertz, and J. Birch, 'Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition', Proc. SPIE, 4506, 14 (2001)
    • (2001) Proc. SPIE , vol.4506 , pp. 14
    • Eriksson, F.1    Johansson, G.A.2    Hertz, H.M.3    Birch, J.4
  • 26
    • 84862346472 scopus 로고    scopus 로고
    • APEC Version 1.1; 〈http://asc.harvard.edu/atomdb〉
    • APEC Version 1.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.