EUV reflectivity and stability of tri-component Al-based multilayers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8168, Issue , 2011, Pages

  Meltchakova, E ^a   Ziani, A ^a   Auchere, F ^b   Zhang, X ^b   Roulliay, M ^c   De Rossi, S ^a   Bourassin Bouchet, Ch ^a   Jerome A ^a   Bridou, F ^a   Varniere, F ^a   Delmotte, F ^a  

^a INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^b UNIVERSITÉ PARIS SUD   (France)

^c INSTITUT DES SCIENCES MOLÉCULAIRES D ORSAY   (France)

Author keywords

Aluminum; EUV; Multilayer; Reflectivity; Roughness

Indexed keywords

ALUMINUM; ALUMINUM COATINGS; FILM PREPARATION; REFLECTION; REFRACTORY METALS; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; SYNCHROTRONS; THERMODYNAMIC STABILITY;

EUV REFLECTIVITY; EXTREME ULTRAVIOLETS; HIGH ORDER HARMONIC GENERATION; INTERFACIAL ROUGHNESS; MULTI-LAYER MIRRORS; MULTI-LAYER-COATING; NORMAL INCIDENCE; PERIODIC STACKS;

MULTILAYERS;

EID: 80455131131     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.896577     Document Type: Conference Paper

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