A 10,000 groove/mm multilayer coated grating for EUV spectroscopy

Optics Express

Volumn 19, Issue 7, 2011, Pages 6320-6325

  Voronov, D L ^a   Anderson, E H ^a   Cambie, R ^a   Cabrini, S ^a   Dhuey, S D ^a   Goray, L I ^b,c   Gullikson, E M ^a   Salmassi, F ^a   Warwick, T ^a   Yashchuk, V V ^a   Padmore, H A ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b ST PETERSBURG ACADEMIC UNIVERSITY   (Russian Federation)

^c INSTITUTE FOR ANALYTICAL INSTRUMENTATION   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

SUBSTRATES; ULTRAVIOLET SPECTROSCOPY;

CROSS-SECTIONAL TEM; EUV SPECTROSCOPY; INCIDENCE ANGLES; LINE DENSITY; MULTI-LAYER-COATING; MULTILAYER GRATING; OPTIMAL DESIGN; SI SUBSTRATES; SOFT X-RAY; SURFACE MOBILITY; THEORETICAL PERFORMANCE; ULTRA-HIGH;

MULTILAYERS;

ARTICLE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; REFRACTOMETRY; ULTRAVIOLET SPECTROPHOTOMETRY;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; REFRACTOMETRY; SPECTROPHOTOMETRY, ULTRAVIOLET;

EID: 79953221517     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.006320     Document Type: Article

References (12)

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