Development of Al-based multilayer optics for EUV

Applied Physics A: Materials Science and Processing

Volumn 98, Issue 1, 2010, Pages 111-117

  Meltchakov, E ^a   Hecquet, C ^a   Roulliay, M ^b   De Rossi, S ^a   Menesguen, Y ^a   Jerome A ^a   Bridou, F ^a   Varniere, F ^a   Ravet Krill, M F ^a   Delmotte, F ^a  

^a INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^b Laboratoire D'Interaction du Rayonnement X Avec la Matiére   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLETS; HIGH ORDER HARMONIC GENERATION; INTERFACIAL ROUGHNESS; METAL LAYER; MULTI-LAYER MIRRORS; MULTILAYER OPTICS; OPTICAL PERFORMANCE; PERIODIC STACKS; REFLECTING COATINGS; SPECTRAL RANGE; THREE-COMPONENT SYSTEM;

ALUMINUM; ASTROPHYSICS; MULTILAYERS; REFLECTION; REFRACTORY METALS; ULTRAVIOLET DEVICES;

OPTICAL MULTILAYERS;

EID: 71249083856     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5445-2     Document Type: Article

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