Airborne engineered nanoparticle mass sensor based on a silicon resonant cantilever

Sensors and Actuators, B: Chemical

Volumn 180, Issue , 2013, Pages 77-89

  Wasisto, Hutomo Suryo ^a   Merzsch, Stephan ^a   Waag, Andreas ^a   Uhde, Erik ^b   Salthammer, Tunga ^b   Peiner, Erwin ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

Airborne engineered nanoparticles; Electrostatic precipitator; MEMS; Resonant cantilever; Resonant frequency

Indexed keywords

ELECTROSTATIC PRECIPITATORS; ELECTROSTATICS; MEMS; NANOPARTICLES; NATURAL FREQUENCIES; STRAIN GAGES;

AIRBORNE NANOPARTICLES; CANTILEVER SENSORS; ENGINEERED NANOPARTICLES; MASS SENSITIVITY; PIEZOELECTRIC STACK ACTUATORS; RESONANT CANTILEVER; SENSOR SENSITIVITY; WORKPLACE CONDITIONS;

NANOCANTILEVERS;

EID: 84860559694     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2012.04.003     Document Type: Article

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