Fabrication and characterization of resonant aerosol particle mass sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 863-866

  Hajjam, Arash ^a   Wilson, James C ^a   Rahafrooz, Amir ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL PARTICLES; CALCULATED VALUES; EXPERIMENTAL MEASUREMENTS; HIGH QUALITY FACTORS; LOW FREQUENCY; MASS MEASUREMENTS; MASS SENSITIVITY; MEMS RESONATORS; RESONANT FREQUENCIES;

ATMOSPHERIC AEROSOLS; ATMOSPHERIC PRESSURE; MECHANICAL ENGINEERING; MECHANICS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; REACTIVE ION ETCHING;

RESONATORS;

EID: 77952761711     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442343     Document Type: Conference Paper

References (8)

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6. L. Rodriguez-Pardo, et al, "Sensitivity, noise, and resolution in QCM sensors in liquid media," IEEE Sensors Journal, December 2005.
7. P. V. Wright, "A review of SAW resonator filter technology," IEEE Ultrason. Symp., 1992, pp. 29-38.
8. Y. Yi, A. Rahafrooz, and S. Pourkamali, "Analysis of the collective effects of thermoelastic and fluid damping on silicon beam resonators," Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), Vol. 8, Issue: 2, 2009.