Silicon resonant accelerometer with electronic compensation of input-output cross-talk

Sensors and Actuators, A: Physical

Volumn 123-124, Issue , 2005, Pages 258-266

  Ferrari, V ^a   Ghisla, A ^a   Marioli, D ^a   Taroni, A ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Accelerometer; Cross talk; MEMS; Oscillator; Resonant sensor

Indexed keywords

ACCELEROMETERS; ATMOSPHERIC PRESSURE; MATHEMATICAL TECHNIQUES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; SILICON;

CROSS-TALK; OSCILLATORS; PIEZORESISTIVE DETECTION; RESONANT SENSORS;

INPUT OUTPUT PROGRAMS;

EID: 24944518379     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.03.067     Document Type: Conference Paper

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