Use of self-sensing piezoresistive Si cantilever sensor for determining carbon nanoparticles mass

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8066, Issue , 2011, Pages

  Wasisto, H S ^a   Merzsch, S ^a   Stranz, A ^a   Waag, A ^a   Uhde, E ^b   Kirsch, I ^b   Salthammer, T ^b   Peiner, E ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Wilhelm Klauditz Institut (WKI)   (Germany)

Author keywords

Mass sensitivity; MEMS; Nanoparticles; Piezoresistive cantilever; Resonance frequency; Self sensing

Indexed keywords

ATMOSPHERIC CONDITIONS; CANTILEVER SENSORS; CARBON NANO PARTICLES; EFFECTIVE MASS; ELECTROSTATIC FIELD; FREQUENCY MEASUREMENTS; HIGH-SENSITIVITY; MASS DETECTION; MASS SENSITIVITY; MICRO-CANTILEVERS; PIEZO ACTUATOR; PIEZO-RESISTIVE; PIEZO-RESISTIVE CANTILEVERS; QUALITY FACTORS; RESONANCE FREQUENCIES; RESONANCE FREQUENCY; RESONANCE FREQUENCY SHIFT; SEALED GLASS; SELF-SENSING; SELF-SENSING CANTILEVERS; SILICON CANTILEVER; STABLE CARBON; STRAIN GAUGE; SUPPORTING FRAME; WHEATSTONE BRIDGES;

ACTUATORS; AIR QUALITY; BRIDGE CIRCUITS; CHEMICAL SENSORS; FREQUENCY SHIFT KEYING; GAGES; MEMS; NANOPARTICLES; NATURAL FREQUENCIES; SMART SENSORS; VANADIUM;

NANOCANTILEVERS;

EID: 79960488831     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.886622     Document Type: Conference Paper

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