Surface finish improvement of deep micro bores monitored using an active MEMS cantilever probe

Proceedings of the IEEE International Conference on Industrial Technology

Volumn , Issue , 2010, Pages 297-302

  Peiner, Erwin ^a   Doering, Lutz ^b   Stranz, Andrej ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER PROBE; DIESEL INJECTOR NOZZLES; FABRICATION PROCESS; HIGH ASPECT RATIO; INDUSTRIAL PRODUCTION; MACHINED SURFACE; NON DESTRUCTIVE; REPRODUCIBILITIES; SURFACE FINISHES;

ASPECT RATIO; ATOMIC FORCE MICROSCOPY; FINISHING; INDUSTRY; NANOCANTILEVERS; PROBES;

SPRAY NOZZLES;

EID: 77954422757     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIT.2010.5472696     Document Type: Conference Paper

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