Self-sustained micromechanical resonant particulate microbalance/counters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 629-632

  Hajjam, Arash ^a   Wilson, James C ^a   Rahafrooz, Amir ^a   Pourkamali, Siavash ^a  

^a University of Denver   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOL PARTICLES; ANALOG CIRCUITRY; HIGH-PRECISION; INDIVIDUAL PARTICLES; MASS MEASUREMENTS; MASS SENSITIVITY; MICRO-MECHANICAL; MICROBALANCES; MICROMECHANICAL OSCILLATORS; PIEZO-RESISTIVE; SUBMICRON DIAMETERS;

ANALOG CIRCUITS; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING;

MEMS;

EID: 79953786667     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734503     Document Type: Conference Paper

References (12)

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