Silicon cantilever sensor for micro-/nanoscale dimension and force metrology

Microsystem Technologies

Volumn 14, Issue 4-5, 2008, Pages 441-451

  Peiner, Erwin ^a   Doering, Lutz ^b   Balke, Michael ^a   Christ, Andreas ^c  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b Physikalisch Technische Bundesanstalt ^*  (Germany)

^c MARTIN LUTHER UNIVERSITY HALLE WITTENBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CALIBRATION; FORCE MEASUREMENT; HAPTIC INTERFACES; SURFACE ROUGHNESS;

CANTILEVER SENSORS; FORCE METROLOGY;

SILICON SENSORS;

EID: 41149132132     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0436-8     Document Type: Conference Paper

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