A high quality-factor silicon cantilever for a low detection-limit resonant mass sensor operated in air

Journal of Micromechanics and Microengineering

Volumn 17, Issue 12, 2007, Pages 2491-2494

  Ikehara, T ^a   Lu, J ^a   Konno, M ^a   Maeda, R ^a   Mihara, T ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

RESONANCE; SENSORS; SILICON; VIBRATION ANALYSIS;

MASS SENSORS; QUALITY FACTORS;

CANTILEVER BEAMS;

EID: 36949019743     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/12/015     Document Type: Article

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