Cancellation of environmental effects in resonant mass sensors based on resonance mode and effective mass

Review of Scientific Instruments

Volumn 80, Issue 6, 2009, Pages

  Naeli, Kianoush ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANALYTICAL EXPRESSIONS; BEFORE AND AFTER; DUAL MODES; EFFECTIVE MASS; ENVIRONMENTAL EFFECTS; ENVIRONMENTAL PARAMETER; FLEXURAL RESONANCE FREQUENCY; LOOK UP TABLE; MASS SENSING; MEASUREMENT DATA; NOVEL TECHNIQUES; RESONANCE MODE; RESONANT CANTILEVER; RESONANT MASS SENSORS; SILICON CANTILEVER; TEMPERATURE COMPENSATION TECHNIQUE;

ATOMIC FORCE MICROSCOPY; CANTILEVER BEAMS; MOISTURE; NANOCANTILEVERS; PILE FOUNDATIONS; TABLE LOOKUP;

RESONANCE;

EID: 67650302645     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3143567     Document Type: Article

References (36)

1. W. H. King, Anal. Chem. 0003-2700 36, 1735 (1964). 10.1021/ac60215a012
2. V. M. Mecea, Sens. Actuators, A 0924-4247 40, 1 (1994). 10.1016/0924-4247(94)85026-7
3. H. Zhang and E. S. Kim, J. Microelectromech. Syst. 1057-7157 14, 699 (2005). 10.1109/JMEMS.2005.845405
4. H. Wohltjen, Sens. Actuators 0250-6874 5, 307 (1984). 10.1016/0250-6874(84)85014-3
5. V. Ferrari, D. Marioli, A. Taroni, E. Ranucci, and P. Ferruti, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 43, 601 (1996). 10.1109/58.503720
6. D. Lange, C. Hagleitner, A. Hierlemann, O. Brand, and H. Baltes, Anal. Chem. 0003-2700 74, 3084 (2002). 10.1021/ac011269j
7. F. M. Battiston, J. P. Ramseyer, H. P. Lang, M. K. Baller, C. Gerber, J. K. Gimzewski, E. Meyer, and H. J. Güntherodt, Sens. Actuators B 0925-4005 77, 122 (2001). 10.1016/S0925-4005(01)00683-9
8. T. Thundat, P. I. Oden, and R. J. Warmack, Microscale Thermophys. Eng. 1, 185 (1997). 10.1080/108939597200214
9. M. Li, H. X. Tang, and M. L. Roukes, Nat. Nanotechnol. 1748-3387 2, 114 (2007). 10.1038/nnano.2006.208
10. F. L. Walls and J. J. Gagnepain, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 39, 241 (1992). 10.1109/58.139120
11. T. Thundat, G. Y. Chen, R. J. Warmack, D. P. Allison, and E. A. Wachter, Anal. Chem. 0003-2700 67, 519 (1995). 10.1021/ac00099a006
12. W. Y. Shih, Q. Zhu, and W. H. Shih, J. Appl. Phys. 104, 074503 (2008). 10.1063/1.2990057
13. E. P. Quevy and R. T. Howe, Proceedings of the IEEE Radio Frequency Integrated Circuits (RFIC) Symposium, Long Beach, CA, 2005, pp. 113-116.
14. J. J. Caron, R. B. Haskell, P. Benoit, and J. F. Vetelino, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 45, 1393 (1998). 10.1109/58.726467
15. T. Ono, D. F. Wang, and M. Esashi, Proceedings of the IEEE Conference on Sensors, Toronto, ON, 2003, Vol. 2, pp. 825-829.
16. K. Sundaresan, G. K. Ho, S. Pourkamali, and F. Ayazi, IEEE J. Solid-State Circuits 0018-9200 42, 1425 (2007). 10.1109/JSSC.2007.896521
17. J. H. Seo, K. S. Demirci, A. Byun, S. Truax, and O. Brand, J. Appl. Phys. 0021-8979 104, 014911 (2008). 10.1063/1.2952050
18. R. Melamud, B. Kim, S. A. Chandorkar, M. A. Hopcroft, M. Agarwal, C. M. Jha, and T. W. Kenny, Appl. Phys. Lett. 0003-6951 90, 244107 (2007). 10.1063/1.2748092
19. W. Pang, R. C. Ruby, R. Parker, P. W. Fisher, M. A. Unkrich, and J. D. Larson III, IEEE Electron Device Lett. 0741-3106 29, 315 (2008). 10.1109/LED.2008.917116
20. J. Bjurstrom, G. Wingqvist, V. Yantchev, and I. Katardjiev, J. Micromech. Microeng. 0960-1317 17, 651 (2007). 10.1088/0960-1317/17/3/030
21. W.-T. Hsu, J. R. Clark, and C. T. C. Nguyen, Proceedings of the International Electron Devices Meeting (IEDM), San Francisco, CA, 2000, pp. 399-402.
22. J. Veris, Sens. Actuators, A 0924-4247 57, 179 (1996). 10.1016/S0924-4247(97)80111-2
23. R. G. Azevedo, W. Huang, O. M. O'Reilly, and A. P. Pisano, Sens. Actuators, A 0924-4247 144, 374 (2008). 10.1016/j.sna.2008.02.007
24. M. Koskenvuori, V. Kaajakari, T. Mattila, and I. Tittonen, Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Tucson, AZ, 2008, pp. 78-81.
25. D. E. Pierce, Y. Kim, and J. R. Vig, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 0885-3010 45, 1238 (1998). 10.1109/58.726449
26. It is important to note how the terms "mode" and "overtone" are used throughout this work. A mechanical structure can resonate in different classes of modes (or simply, modes), e.g., flexural, torsional, or longitudinal modes. Meanwhile, each class of modes consists of overtones, which correspond to the eigenvalues of the general solution for the governing resonance equation of that particular mode class (e.g., flexural modes or overtones).
27. S. Timoshenko, D. H. Young, and W. Weaver, Vibration Problems in Engineering, 4th ed. (Wiley, New York, 1974).
28. N. Lobontiu, Dynamics of Microelectromechanical Systems, 1st ed. (Springer, New York, 2007).
29. A. Hierlemann, O. Brand, C. Hagleitner, and H. Baltes, Proc. IEEE 0018-9219 91, 839 (2003). 10.1109/JPROC.2003.813583
30. N. V. Lavrik, M. J. Sepaniak, and P. G. Datskos, Rev. Sci. Instrum. 0034-6748 75, 2229 (2004). 10.1063/1.1763252
31. P. M. Morse, Vibration and Sound, 2nd ed. (McGraw-Hill, New York, 1948).
32. H. J. Butt and M. Jaschke, Nanotechnology 0957-4484 6, 1 (1995). 10.1088/0957-4484/6/1/001
33. R. A. Johnson, Mechanical Filters in Electronics (Wiley, New York, 1983).
34. S. Dohn, R. Sandberg, W. Svendsen, and A. Boisen, Appl. Phys. Lett. 0003-6951 86, 233501 (2005). 10.1063/1.1948521
35. S. Dohn, W. Svendsen, A. Boisen, and O. Hansen, Rev. Sci. Instrum. 0034-6748 78, 103303 (2007). 10.1063/1.2804074
36. K. Naeli and O. Brand, Rev. Sci. Instrum. 80, 045105 (2009). 10.1063/1.3115209