Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

Journal of Micromechanics and Microengineering

Volumn 22, Issue 5, 2012, Pages

  Lou, Liang ^a,b   Zhang, Songsong ^a   Park, Woo Tae ^c   Tsai, J M ^b   Kwong, Dim Lee ^b   Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c Seoul National University of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH SENSITIVITY; MEASUREMENT RANGE; MULTI-LAYERED; OPTIMIZED DESIGNS; PIEZORESISTIVE SENSING; SILICON NANOWIRES;

NANOWIRES; OPTIMIZATION; PRESSURE SENSORS; SILICON NITRIDE; SILICON OXIDES;

DIAPHRAGMS;

EID: 84860439171     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/22/5/055012     Document Type: Article

References (51)

1. Smith C S 1954 Piezoresistance effect in germanium and silicon Phys. Rev. 94 429
2. Peake E R, Zias A R and Egan J V 1969 Solid-state digital pressure transducer IEEE Trans. Electron Devices 16 8706
3. Barlian A A, Park W-T, Mallon J R, Rastegar A J Jr and Pruitt B L 2009 Review: semiconductor piezoresistance for microsystems Proc. IEEE 97 51352
4. Fleming W J 2001 Overview of automotive sensors IEEE Sensors J. 1 296308 (Pubitemid 33778182)
5. Esashi M, Sugiyama S, Ikeda K, Wang Y and Miyashita H 1998 Vacuum-sealed silicon micromachined pressure sensors Proc. IEEE 86 162739
6. Eddy D and Sparks D 1998 Applications of MEMS technology in automotive sensors and actuators Proc. IEEE 86 174755 (Pubitemid 128720276)
7. Eaton W P and Smith J H 1997 Micromachined pressure sensors: review and recent developments Smart Mater. Struct. 6 5309 (Pubitemid 127655962)
8. Marco S, Samitier J, Ruiz O, Morante J R and Steve J E 1996 High performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes Meas. Sci. Technol. 7 1195203 (Pubitemid 126527455)
9. Katuri K C, Asrani S and Ramasubramanian M K 2008 Intraocular pressure monitoring sensors IEEE Sensors J. 8 129 (Pubitemid 350206063)
10. Peng C, Ko W H and Young D J 2010 Wireless batteryless implantable blood pressure monitoring microsystem for small laboratory animals IEEE Sensors J 10 24354
11. Chatzandroulis S, Tsoukalas D and Neukomm P A 2000 A miniature pressure system with a capacitive sensor and a passive telemetry link for use in implantable applications IEEE J. Microelectromech. Syst. 9 1823 (Pubitemid 30581717)
12. Samaun, Wise K D and Angell J B 1973 IC piezoresistive pressure sensor for biomedical instrumentation IEEE Trans. Biomed. Eng. BME-20 1019
13. Borky J and Wise K D 1979 Integrated signal conditioning for silicon pressure sensors IEEE Trans. Electron Devices ED-26 190610 (Pubitemid 10455520)
14. Kalvesten E, Smith L, Tenerz L and Stemme G 1998 The first surface micromachined pressure sensor for cardiovascular pressure measurements Proc. of IEEE MEMS 98 The Eleventh Annu. Int. Workshop pp 5749
15. Lou L et al 2010 Sensorized guidewires with MEMS tri-axial force sensor for minimally invasive surgical applications IEEE Proc. of Eng. in Medicine and Biology Society (EMBC), 2010 Annu. Int. Conf. pp 64614
16. Rebello K J 2004 Applications of MEMS in surgery Proc. IEEE 92 4355 (Pubitemid 40890771)
17. Haga Y and Esashi M 2004 Biomedical microsystems for minimally invasive diagnosis and treatment Proc. IEEE 92 98114 (Pubitemid 40902554)
18. Mokwa W 2007 Medical implants based on microsystems Meas. Sci. Technol. 18 R4757
19. Wu C H, Zorman C A and Mehregany M 2006 Fabrication and testing of bulk micromachined silicon carbide piezoresistive pressure sensors for high temperature applications IEEE Sensors J. 6 31624
20. Receveur R A M, Lindemans F W and de Rooij N F 2007 Microsystem technologies for implantable applications J. Micromech. Microeng. 17 R5080
21. Wang Q, Zhang L, Sun C and Xu Q 2008 Multiplexed fiber-optic pressure and temperature sensor system for down-hole measurement IEEE Sensors J. 08 187983
22. Fedder G K, Howe R T, Liu T-J K and Quevy E P 2008 Technologies for cofabricating MEMS and electronics Proc. IEEE 96 30622
23. Tsai M-H, Sun C-M, Liu Y-C, Wang C and Fang W 2009 Design and application of a metal wet-etching post-process for the improvement of CMOS-MEMS capacitive sensors J. Micromech. Microeng. 19 105017
24. Li D, Zhao T, Yang Z and Zhang D 2010 Monolithic integration of a micromachined piezoresistive flow sensor J. Micromech. Microeng. 20 035024
25. Li D, Li T and Zhang D 2011 A monolithic piezoresistive pressure-flow sensor with integrated signal-conditioning circuit IEEE Sensors J. 11 21228
26. Tan S S, Liu C Y, Yeh L K, Chiu Y H and Hsu K Y J 2011 A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability J. Micromech. Microeng. 21 035005
27. Hsieh H-S, Chang H-C, Hu C-F, Cheng C-L and Fang W 2011 A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer J. Micromech. Microeng. 21 105006
28. Liu Y C, Tsai M-H, Tang T-L and Fang W 2011 Post-CMOS selective electroplating technique for the improvement of CMOS-MEMS accelerometers J. Micromech. Microeng. 21 105005
29. Nair P R and Alam M A 2007 Design considerations of silicon nanowire biosensors IEEE Trans. Electron Devices 54 34008 (Pubitemid 350225946)
30. Gao Z, Agarwal A, Trigg A D, Singh N, Fang C, Tung C-H, Fan Y, Buddharaju K D and Kong J 2007 Silicon nanowire arrays for label-free detection of DNA Anal. Chem. 79 32917 (Pubitemid 46717159)
31. Toriyama T, Tanimoto Y and Sugiyama S 2002 Single crystal silicon nano-wire piezoresistors for mechanical sensors J. Microelectromech. Syst. 11 60511 (Pubitemid 35242067)
32. He R and Yang P 2006 Giant piezoresistance effect in silicon nanowires Nature Nanotechnology 1 426
33. Reck K, Richter J, Hansen O and Thomsen E V 2008 Piezoresistive effect in top-down fabricated silicon nanowires Proc. IEEE MEMS pp 71720
34. Neuzil P, Wong C C and Reboud J 2010 Electrically controlled giant piezoresistance in silicon nanowires Nano Lett. 10 124852
35. Soon B, Neuzil P, Wong C, Reboud J, Feng H and Lee C 2010 Ultrasensitive nanowire pressure sensor makes its debut Procedia Eng. 5 112730
36. Singh P, Miao J, Park W-T and Kwong D-L 2011 Gate-bias-controlled sensitivity and SNR enhancement in a nanowire FET pressure sensor J. Micromech. Microeng. 21 105007
37. Kanda Y and Yasukawa A 1997 Optimum design considerations for silicon piezoresistive pressure sensors Sensors Actuators A 62 53942 (Pubitemid 127389635)
38. Gong S-C and Lee C 2001 Analytical solutions of sensitivity for pressure microsensors IEEE Sensors J. 1 3404 (Pubitemid 33778187)
39. Pramanik C and Saha H 2006 Piezoresistive pressure sensing by porous silicon membrane IEEE Sensors J. 6 3019
40. Pramanik C, Saha H and Gangopadhyay U 2006 Design optimisation of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications J. Micromech. Microeng. 16 20606 (Pubitemid 44403654)
41. Park S-J, Doll J C, Rastegar A J and Pruitt Beth L 2010 Piezoresistive cantilever performance-part II optimization IEEE J. Microelectromech. Syst. 19 14961
42. Lund E and Finstada T G 2004 Design and construction of a four-point bending based set-up for measurement of piezoresistance in semiconductors Rev. Sci. Instrum. 75 49606 (Pubitemid 40001824)
43. Henning A K, Chan N N, Watt J T and Plummer J D 1987 Substrate current at cryogenic temperatures: measurements, and a 2D model for CMOS technology IEEE Trans. Electron Devices 34 6474
44. Kanda Y 1982 A graphical representation of the piezoresistance coefficients in silicon IEEE Trans. Electron Devices 29 6470 (Pubitemid 12474034)
45. Ziebart V, Paul O and Baltes H 1999 Strongly buckled micromachined square membranes J. Microelectromech. Syst. 8 42332 (Pubitemid 30552570)
46. Eaton W P, Bitsie F, Smith J H and Plummer D W 1999 A new analytical solution for diaphragm deflection and its application to a surface-micromachined pressure sensor Proc. Int. Conf. on Modeling and Simulation of Microsystems, MSM 99 (San Juan, Puerto Rico, USA,)
47. 2/Si3N4 diaphragms J. Microelectromech. Syst. 17 112034
48. Hatty V, Kahn H and Heuer A H 2008 Fracture toughness, fracture strength, and stress corrosion cracking of silicon dioxide thin films J. Microelectromech. Syst. 17 9437
49. Huang H, Hu X Z, Liu Y, Bush M, Winchester K, Musca C, Dell J and Faraone L 2005 Characterization of mechanical properties of silicon nitride thin films for MEMS devices by nanoindentation J. Mater. Sci. Technol. 21 136 (Pubitemid 40955995)
50. Bistuéa G, Elizaldea J G, García-Alonsob S, Castañoa E, Graciaa F J and García-Alonsoa A 1997 A design tool for pressure microsensors based on FEM simulations Sensors Actuators A 62 5914
51. Hsin C-L, Mai W, Gu Y, Gao Y, Huang C-T, Liu Y, Chen L-J and Wang Z-L 2008 Elastic properties and buckling of silicon nanowires Adv. Mater. 20 391923