First surface micromachined pressure sensor for cardiovascular pressure measurements

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 574-579

  Kalvesten, J E ^a   Smith, L ^a   Tenerz, L ^a   Stemme, G ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARDIOVASCULAR SYSTEM; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC DEVICES; PRESSURE MEASUREMENT; SILICON WAFERS;

CARDIOVASCULAR PRESSURE MEAASUREMENTS; PRESSURE SENSORS;

BIOSENSORS;

EID: 0031703122     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)