Analytical solutions of sensitivity for pressure microsensors

IEEE Sensors Journal

Volumn 1, Issue 4, 2001, Pages 340-344

  Gong, Shih Chin ^a   Lee, Chengkuo ^a  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

Author keywords

Microsensors; Piezoresistive; Pressure

Indexed keywords

EID: 1542285556     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/7361.983474     Document Type: Article

References (9)

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