Design optimization of a high performance silicon MEMS piezoresistive pressure sensor for biomedical applications

Journal of Micromechanics and Microengineering

Volumn 16, Issue 10, 2006, Pages 2060-2066

  Pramanik, C ^a   Saha, H ^b   Gangopadhyay, U ^b  

^a INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

^b JADAVPUR UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; CONCENTRATION (PROCESS); DOPING (ADDITIVES); MICROELECTROMECHANICAL DEVICES; OPTIMIZATION; PIEZOELECTRIC DEVICES; PRODUCT DESIGN; SIGNAL TO NOISE RATIO; SILICON;

BIOMEDICAL APPLICATIONS; PIEZORESISTORS; SILICON MEMS PIEZORESISTIVE PRESSURE SENSOR; TEMPERATURE COEFFICIENT OF PIEZORESISTANCE (TCPR);

BIOSENSORS;

EID: 33748802568     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/10/019     Document Type: Article

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