High-performance piezoresistive pressure sensors for biomedical applications using very thin structured membranes

Measurement Science and Technology

Volumn 7, Issue 9, 1996, Pages 1195-1203

  Marco, S ^a   Samitier, J ^a   Ruiz, O ^a   Morante, J R ^a   Esteve, J ^b  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS;

ELECTROCHEMICAL ETCH STOP; FLAT DIAPHRAGMS; NONLINEAR ERROR REDUCTION; PIEZORESISTIVE PRESSURE SENSORS;

SILICON SENSORS;

EID: 0030244565     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/7/9/002     Document Type: Article

References (13)

1. Wilner L B 1977 A diffused silicon pressure transducer with stress concentrated at the transverse gauges ISA 23rd Int. Instrumentation Symp. (Las Vegas, NV, USA) 1977
2. Mallon J R, Pourahmadi J R F, Petersen K, Barth P, Vermeulen T and Bryzek J 1990 Low-pressure sensors employing bossed diaphragms and precision etch-stopping Sens. Actuators A 21-23 137-41
3. Sandmaier H 1991 Nonlinear analytical modelling of bossed diaphragms for pressure sensors Sens. Actuators A 25-27 815-9
4. Whittier R M 1990 High performance miniaturized piezoresistive pressure transducer Proc. 1st Int. Conf. Micro-Electro-Opto-Mechanical Systems and Components (Berlin, Germany) 1990
5. Bao M H, Yu L Z and Wang Y 1991 Stress concentration structure with front beam for pressure sensor Sens. Actuators A 28 105-22
6. Johnson R H, Karbassi S, Sridhar U and Speldrich B 1993 A high sensitivity ribbed and bossed pressure transducer Sens. Actuators A 35 93-9
7. Hein S 1993 Piezoresistive silicon sensor for very low pressures based on the concept of stress concentration 7th Int. Conf. Solid State Sensors and Actuators TRANSDUCERS'93 (Yokohama, Japan) 1993
8. Götz A, Esteve J, Bausells J, Marco S, Samitier J and Morante J R 1993 Passivation analysis of micromechanical silicon structures obtained by electrochemical etch-stop Sens. Actuators A 37-38 744-50
9. Marco S, J Samitier J, Morante J R, Götz A and Esteve J 1995 Novel structures for miniature pressure transducers obtained by electrochemical etch-stop on diffused membranes Sens. Mater. 7 331-45
10. Marco S, Samitier J, Ruiz O, Morante J R and Esteve J 1993 Analysis of nonlinearity in high sensitivity piezoresistive pressure sensors Sens. Actuators A 37-38 790-5
11. Matsuda K, Kanda Y, Yamamura K and Suzuki K 1990 Nonlinearity of piezoresistance effect in p- and n-type silicon Sens. Actuators A 21-23 45-8
12. Marco S, Samitier J, Morante J R, Götz A and Esteve J 1993 Three-dimensional structures obtained by double-diffusion and electrochemical etch-stop J. Micromech. Microeng. 3 141-2
13. Kerr D R and Milnes A G 1963 Piezoresistance of diffused layers in cubic semiconductors J. Appl. Phys. 34 313-18