Monolithic integration of a micromachined piezoresistive flow sensor

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Li, Dan ^a   Zhao, Tao ^a   Yang, Zhenchuan ^a   Zhang, Dacheng ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BORON IMPLANTATION; CMOS CIRCUITS; COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; DEEP REACTIVE ION ETCHING; DRAG FORCES; FLOW-SENSORS; GAS FLOWS; INTEGRATED PRESSURE; MEASUREMENT RANGE; MEMS (MICROELECTROMECHANICAL SYSTEM); MICROMACHINED; MONOLITHIC INTEGRATION; NOISE FLOOR; PIEZO-RESISTIVE; PIEZO-RESISTORS; PIEZORESISTOR; SENSOR OUTPUT; SIGNAL CONDITIONING; SILICON DIAPHRAGM; STANDARD CMOS PROCESS; TEMPERATURE COMPENSATION; TESTING RESULTS; TOTAL CHIP AREA;

BORON; BORON COMPOUNDS; CMOS INTEGRATED CIRCUITS; DIAPHRAGMS; DRAG; MEMS; SENSORS;

REACTIVE ION ETCHING;

EID: 77749335680     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035024     Document Type: Article

References (13)

1. Nguyen N T 1997 Micromachined flow sensors-a review Flow Meas. Instrum. 8 7-16
2. Nguyen N T and Kiehnscherf R 1995 Low-cost silicon sensors for mass flow measurement of liquids and gases Sensors Actuators A 49 17-20
3. van Baar J J, Wiegerink R J, Lammerink T S J, Krijnen G J M and Elwenspoek M 2001 Micromachined structures for thermal measurements of fluid and flow parameters J. Micromech. Microeng. 11 311-8
4. Pagonis D N, Kaltsas G and Nassiopoulou A G 2004 Fabrication and testing of an integrated thermal flow sensor employing thermal isolation by a porous silicon membrane over an air cavity J. Micromech. Microeng 14 793-7
5. Chen J, Fan Z and Zou J 2003 Two-dimensional micromachined flow sensor array for fluid mechanics studies J. Aerosp. Eng. 16 85-97
6. Wang Y H, Lee C Y and Chiang C M 2007 A MEMS-based air flow sensor with a free-standing micro-cantilever structure Sensors 7 2389-401
7. Bruschi P, Ciomei A and Piotto M 2008 Design and analysis of integrated flow sensors by means of a two-dimensional finite element model Sensors Actuators A 142 153-9
8. Yoon E and Wise K D 1992 An integrated mass flow sensor with on-chip CMOS interface circuitry IEEE Trans. Electron. Devices 39 1376-86
9. Robadey J, Paul O and Baltes H 1995 Two-dimensional integrated gas flow sensors by CMOS IC technology J. Micromech. Microeng. 5 243-50
10. Schafer H, Greeter V and Kobs R 1989 Temperature-independent pressure sensors using polycrystalline silicon strain gauges Sensors Actuators A 17 521-7
11. Landau L D and Lifshitz E M 1959 Fluid Mechanics (London: Addison-Wesley)
12. Lee C Y, Tsai C H, Chen L W, Fu L M and Chen Y C 2006 Elastic-plastic modeling of heat-treated bimorph micro-cantilevers Microsyst. Technol. 12 979-86
13. Kim S-C and Wise K D 1983 Temperature sensitivity in silicon piezoresistive pressure transducers Trans. Electron. Devices 30 802-10