Piezoresistive cantilever performance part II: Optimization

Journal of Microelectromechanical Systems

Volumn 19, Issue 1, 2010, Pages 149-161

  Park, Sung Jin ^a   Doll, Joseph C ^a   Rastegar, Ali J ^a   Pruitt, Beth L ^a  

^a Stanford University   (United States)

Author keywords

Force sensor; Optimization; Piezoresistance; Piezoresistive cantilever

Indexed keywords

ANALYTICAL MODEL; COMBINED SIMULATION; DESIGN CONSTRAINTS; DESIGN PARAMETERS; DISPLACEMENT RESOLUTION; DOPING METHODS; ELECTRONIC READOUT; FORCE RESOLUTION; FORCE SENSOR; LOW COSTS; MEASUREMENT RESULTS; OPTIMIZATION APPROACH; OPTIMIZATION TECHNIQUES; OPTIMIZED CONDITIONS; PIEZO-RESISTIVE; PIEZO-RESISTIVE CANTILEVERS; PIEZORESISTANCE; PROCESS CONDITION; PROCESS PARAMETERS; SILICON CANTILEVER; SIMPLIFIED MODELS; SIMULATION RESULT;

ATOMIC FORCE MICROSCOPY; DESIGN; ION BOMBARDMENT; ION IMPLANTATION; NANOCANTILEVERS; SENSORS;

OPTIMIZATION;

EID: 76349117674     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2036582     Document Type: Article

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