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Volumn 3, Issue 2, 2012, Pages 369-376
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Design and preparation of porous polybenzoxazole films using the tert-butoxycarbonyl group as a pore generator and their application for patternable low-k materials
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL INERTNESS;
DEVICE PERFORMANCE;
EXCELLENT SOLUBILITY;
FILM MORPHOLOGY;
FUNCTIONALIZATIONS;
HIGH THERMAL CONDUCTIVITY;
INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS;
K-VALUES;
LOW COEFFICIENT OF THERMAL EXPANSIONS;
LOW DIELECTRIC CONSTANTS;
LOW-K MATERIALS;
MECHANICAL TOUGHNESS;
MICRO PATTERNING;
POLY (P-PHENYLENE BENZOBISOXAZOLE);
POLYBENZOXAZOLE FILMS;
PROCESSABILITY;
TERT-BUTOXYCARBONYL (T-BOC);
AROMATIC POLYMERS;
CHEMICAL STABILITY;
DIELECTRIC MATERIALS;
FILMS;
MICROELECTRONICS;
ORGANIC SOLVENTS;
SCANNING ELECTRON MICROSCOPY;
THERMAL CONDUCTIVITY OF SOLIDS;
THERMAL EXPANSION;
FILM PREPARATION;
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EID: 84855701357
PISSN: 17599954
EISSN: 17599962
Source Type: Journal
DOI: 10.1039/c1py00470k Document Type: Article |
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Times cited : (48)
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References (52)
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