Barrier-free interconnect with organic spin-on dielectric

Advanced Metallization Conference (AMC)

Volumn 2006, Issue , 2006, Pages 359-365

  Maeda, Nobuhide ^a   Takimoto, Yoshio ^a   Maejima, Kenzo ^b   Nakajima, Michio ^b   Funatsu, Keisuke ^a  

^a Consortium for Advanced Semiconductor Materials and Related Technologies ^*  (Japan)

^b Sumitomo Bakelite Co Ltd ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRONIC STRUCTURE; GRAIN BOUNDARIES; LEAKAGE CURRENTS; PARAMAGNETIC RESONANCE;

BARRIER FREE INTERCONNECTS; CRYSTAL GRAIN; POLYBENZOXAZOLE (PBO);

OPTICAL INTERCONNECTS;

EID: 33947244999     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. N. Maeda, et al., Proc. AMC2005 (2005) 445
2. M. Tada, et al., VLSI Tech. Digest (2001) 12