Photopatternable insulating materials

Applied Surface Science

Volumn 106, Issue , 1996, Pages 311-315

  Ahne, Hellmut ^a   Rubner, Roland ^a   Sezi, Recai ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIELECTRIC PROPERTIES OF SOLIDS; ELECTRIC INSULATING MATERIALS; ELECTRONICS PACKAGING; INTEGRATED CIRCUIT MANUFACTURE; MICROELECTRONIC PROCESSING; MULTICHIP MODULES;

DIAZOQUINONE SENSITIZER; POLYBENZOXAZOLE (PBO) PRECURSOR;

ORGANIC POLYMERS;

EID: 0030565890     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00383-2     Document Type: Article

References (12)

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8. M.G. Moss, R.M. Cuzmar and T. Brewer, Proc. SPIE 1086 (1989) 396; T. Omote, H. Mochizuki, K. Koseki and T. Yamaoka, Makromol. Chem. Rapid Commun. 10 (1989) 521; T. Omote, K. Koseki and T. Yamaoka, J. Polym. Sci. C 28 (1990) 59; R.H. Hayase, N. Kihara, N. Oyasato, S. Matake and M. Oba, Proc. SPIE 1466 (1991) 438; T. Omote and T. Yamaoka, Conf. Prepr. 'Photopolymers Principles - Processes and Materials', Ellenville, NY, USA, 1991, 379; K. Takano, Y. Mikogami, Y. Nakano, R. Hayase and S. Hayase, J. Appl. Polym. Sci. 46 (1992) 1137; K. Naitoh, K. Ishii, T. Yamaoka and T. Omote, Polym. Adv. Technol. 4 (1993) 294; H. Ahne, R. Leuschner and R. Rubner, Polym. Adv. Technol. 4 (1993) 217.
9. M.G. Moss, R.M. Cuzmar and T. Brewer, Proc. SPIE 1086 (1989) 396; T. Omote, H. Mochizuki, K. Koseki and T. Yamaoka, Makromol. Chem. Rapid Commun. 10 (1989) 521; T. Omote, K. Koseki and T. Yamaoka, J. Polym. Sci. C 28 (1990) 59; R.H. Hayase, N. Kihara, N. Oyasato, S. Matake and M. Oba, Proc. SPIE 1466 (1991) 438; T. Omote and T. Yamaoka, Conf. Prepr. 'Photopolymers Principles - Processes and Materials', Ellenville, NY, USA, 1991, 379; K. Takano, Y. Mikogami, Y. Nakano, R. Hayase and S. Hayase, J. Appl. Polym. Sci. 46 (1992) 1137; K. Naitoh, K. Ishii, T. Yamaoka and T. Omote, Polym. Adv. Technol. 4 (1993) 294; H. Ahne, R. Leuschner and R. Rubner, Polym. Adv. Technol. 4 (1993) 217.
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