Optical pump and probe measurement of the thermal conductivity of low-k dielectric thin films

Journal of Applied Physics

Volumn 92, Issue 10, 2002, Pages 6005-6009

  Daly, Brian C ^a   Maris, Humphrey J ^a   Ford, Wayne K ^b   Antonelli, George A ^b   Wong, Larry ^b   Andideh, Ebrahim ^b  

^a BROWN UNIVERSITY   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SOLIDS; CARBON-DOPED OXIDES; FLUORINATED SILICATE GLASS; FUNCTION OF TIME; LOW K DIELECTRICS; LOW-K DIELECTRIC THIN FILMS; MICROELECTRONICS INDUSTRY; OPTICAL PUMPS; OPTICAL TECHNIQUE; PICOSECOND LIGHT PULSE; PROBE LIGHT; ROOM TEMPERATURE; SILICON SUBSTRATES; TEMPERATURE RANGE;

AMORPHOUS MATERIALS; LIGHT TRANSMISSION; MICROELECTRONICS; OPTICAL PUMPING; PROBES; SILICATES;

THERMAL CONDUCTIVITY;

EID: 0037113043     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1513882     Document Type: Article

References (10)

1. Y. L. Shen, J. Vac. Sci. Technol. B 17, 2115 (1999). jvb JVTBD9 0734-211X
2. W. S. Capinski and H. J. Maris, Rev. Sci. Instrum. 67, 2720 (1996). rsi RSINAK 0034-6748
3. W. S. Capinski, H. J. Maris, T. Ruf, M. Cardona, K. Ploog, D. S. Katzer, Phys. Rev. B 59, 8105 (1999). prb PRBMDO 0163-1829
4. H. T. Grahn, H. J. Maris, J. Tauc, IEEE J. Quantum Electron. 25, 2562 (1989). ejq IEJQA7 0018-9197
5. D. G. Cahill and R. O. Pohl, Solid State Commun. 70, 927 (1989). ssc SSCOA4 0038-1098
6. A. Einstein, Ann. Phys. (Leipzig) 35, 679 (1911). any ANPYA2 0003-3804
7. R. M. Cotescu, A. J. Bullen, G. Matamis, K. E. O'Hara, D. G. Cahill, Phys. Rev. B 65, 094205 (2002). prb PRBMDO 0163-1829
8. T. Nakayama and R. L. Orbach, Physica B 263-264, 261 (1999). phb PHYBE3 0921-4526
9. R. C. Zeller and R. O. Pohl, Phys. Rev. B 4, 2029 (1971). prq PLRBAQ 0556-2805
10. A. Jagannathan, R. Orbach, O. Entin-Wohlman, Phys. Rev. B 39, 13465 (1989).