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Volumn 160, Issue 1, 2011, Pages 490-498

Orientation and thickness dependence of electrical and gas sensing properties in heteroepitaxial indium tin oxide films

Author keywords

Electrical resistivity; Heteroepitaxial film; Indium tin oxide (ITO); NO2 gas sensing; YSZ substrate

Indexed keywords

CHEMICAL COMPOSITIONS; CONTINUOUS FILMS; DEPOSITION TIME; ELECTRICAL RESISTIVITY; FILM ORIENTATIONS; GAS RESPONSE; GAS SENSING PROPERTIES; HALL MEASUREMENTS; HETEROEPITAXIAL; HETEROEPITAXIAL FILMS; HETEROEPITAXIAL RELATIONSHIPS; INDIUM TIN OXIDE (ITO); INDIUM TIN OXIDE FILMS; ISLAND STRUCTURE; ITO FILMS; LOW TEMPERATURES; POLE FIGURE; RF-MAGNETRON SPUTTERING; SN CONCENTRATION; STRUCTURAL CHARACTERISTICS; SUBSTRATE ORIENTATION; THICKNESS DEPENDENCE; THIN LAYERS;

EID: 81155152320     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.08.016     Document Type: Article
Times cited : (8)

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